Gyro Sensor Connecting Spring Elastic Support
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Solution Overview
Problem
Gyro sensors with anti-phase vibrating parts face sticking issues during manufacturing due to meniscus force and electrostatic forces, which can inhibit vibration energy exchange when anchors are used to prevent sticking.
Innovation Solution
A gyro sensor design featuring a connecting spring part indirectly fixed to a second fixing part via an elastically deformable member, allowing for vibration energy exchange without inhibiting anti-phase vibration and preventing sticking by supporting the connecting spring part.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If an anchor is provided in the connecting part to fix and support the connecting part, then sticking is prevented, but vibration energy exchange between the two vibrating parts is inhibited
Solution Approach 1:
The patent introduces an elastic member as an intermediary between the connecting spring part and the base. This elastic member acts as a mediator that provides mechanical support to prevent sticking while allowing elastic deformation to permit vibration energy exchange between the two vibrating parts, thus resolving the contradiction between reliability and energy loss
Solution Approach 2:
The patent makes the support structure dynamic by using an elastically deformable member instead of a rigid anchor. The elastic member can dynamically adapt its stiffness - remaining rigid enough to prevent sticking but flexible enough to allow vibration energy exchange, thus resolving the contradiction between stability and energy exchange
2Adaptability or versatility
If the connecting part is made soft to connect two vibrators, then the structure is flexible, but the connecting part may fall out and stick to the base during wet-etching processing
Solution Approach 1:
The elastic member serves as an intermediary that provides additional support to the connecting spring part during manufacturing processes. This mediator prevents the soft connecting part from falling out and sticking to the base during wet-etching, while maintaining the structural flexibility needed for operation
3Reliability
If the connecting spring part is indirectly fixed via an elastic member, then sticking is prevented and vibration energy exchange is maintained, but the device complexity increases
Solution Approach 1:
The elastic member is designed to perform multiple functions simultaneously: it provides mechanical support to prevent sticking, allows elastic deformation for vibration energy exchange, and can be integrated into the existing spring structure. This multi-functionality reduces the need for separate components, thus mitigating the increase in device complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design enhances the reliability of the gyro sensor by preventing sticking and maintaining vibration energy exchange between anti-phase vibrating parts, effectively separating the drive frequency of in-phase and anti-phase modes.
Implementation Method 1
a first elastic member extending from the connecting spring part in a direction along a second axis intersecting with the first axis and fixed to the second fixing part
Implementation Method 2
the connecting part may fall out and stick to the base (hereinafter, referred to as 'sticking') because of the action of the meniscus force due to surface tension
Implementation Method 3
the connecting part may fall out and stick to the base (hereinafter, referred to as 'sticking') because of the action of the meniscus force due to surface tension, the electrostatic force, or the like
Data Source
AI summary
A gyro sensor includes a vibrator, a spring part extending from a first fixing part to the vibrator in a direction along a first axis, a drive part that excites the vibrator, and a detection part provided on the vibrator, wherein the vibrator has, in a plan view, first and second vibrating parts arranged side by side in the direction along the first axis and drive-vibrate in anti-phase with each other, a connecting spring part that connects the first and second vibrating parts in the direction along the first axis, and a first elastic member extending from the connecting spring part in a direction along a second axis intersecting with the first axis and fixed to a second fixing part.