Gyro Sensor Coupled Movable Bodies Spurious Vibration
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Solution Overview
Problem
Gyro sensors with larger movable bodies experience reduced temperature stability due to increased spurious vibration frequencies approaching detection vibration frequencies, especially when ambient temperature changes.
Innovation Solution
The design incorporates a gyro sensor with coupled movable bodies that vibrate in phase or opposite phase, utilizing spring sections and fixed sections to reduce bending and spurious vibration frequencies, enhancing temperature stability and allowing differential detection of angular velocity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the area of the movable body is increased to improve the S/N ratio, then the S/N ratio is improved, but the frequency of spurious vibration approaches the frequency of detection vibration and temperature stability is lowered
Solution Approach 1:
The movable body is divided into a first movable body and a second movable body, each with smaller individual areas compared to a single large movable body. This segmentation allows the detection sections to function with reduced spurious vibration frequencies while maintaining the combined detection capability needed for good S/N ratio
Solution Approach 2:
The first movable body and the second movable body are coupled together by a coupling section to form an integrated structure. This merging allows the detection sections to work together to improve S/N ratio while each individual movable body maintains smaller dimensions that prevent spurious vibration frequency problems
2Measurement precision
If the area of the movable body is increased to improve the S/N ratio, then the S/N ratio is improved, but bending of the movable body increases
Solution Approach 1:
The movable body is segmented into multiple smaller movable bodies (first and second movable bodies), each experiencing less bending stress than a single large movable body would experience. The coupling section connects these segments to function as an integrated detection structure
Solution Approach 2:
The coupling section is designed with specific local properties to provide structural support and reduce bending of the individual movable bodies while allowing them to vibrate for detection purposes
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration effectively reduces spurious vibration frequencies, improving temperature stability and enabling accurate detection of angular velocity while increasing design flexibility and S/N ratio.
Implementation Method 1
When angular velocity is applied to the gyro sensor in the state where a movable body vibrates by vibration of a drive section, the movable body is displaced by the Coriolis force and thus the angular velocity can be detected
Implementation Method 2
a first movable electrode that vibrates by vibration of the first drive section
Data Source
AI summary
A gyro sensor includes: a substrate; a first drive section; and a first detection section and a second detection section that detect angular velocity. The first detection section includes a first movable body including a first movable electrode that vibrates by vibration of the first drive section and is displaced in response to the angular velocity, and a first fixed electrode fixed to the substrate and facing the first movable electrode. The second detection section includes a second movable body including a second movable electrode that vibrates by vibration of the first drive section and is displaced in response to the angular velocity, and a second fixed electrode fixed to the substrate and facing the second movable electrode. The first movable body and the second movable body are coupled together by a first coupling section.