Gyro Sensor Force Conversion Multi-Axis Detection
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Solution Overview
Problem
Conventional gyro sensors face challenges in miniaturization due to increased mounting area and interference between vibration modes when detecting angular velocities across multiple axes, which hinders their integration and accuracy.
Innovation Solution
The design incorporates a force conversion portion with a rotating body and anchor beams that allows for shared drive portions across mass portions, enabling efficient conversion of vibrations between axes, thereby reducing the overall size and improving detection accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If multiple single-axis angular velocity sensors are arranged in a chip to detect angular velocities about three axes, then the detection capability is improved, but the mounting area is increased
Solution Approach 1:
The patent combines multiple angular velocity sensor elements into a single integrated structure where mass portions are shared across different detection axes. The first mass portion serves both the first angular velocity sensor element (detecting about first axis) and the second angular velocity sensor element (detecting about second axis), eliminating the need for separate mass portions and drive portions for each axis, thereby reducing the overall mounting area while maintaining multi-axis detection capability.
Solution Approach 2:
The drive portion is designed to universally drive multiple mass portions across different axes. A single drive portion can vibrate the first mass portion in the direction of the first axis and also vibrate the third mass portion in the direction of the third axis, making the drive mechanism multi-functional and reducing the number of required drive circuits and IC components.
2Measurement precision
If separate drive circuits and ICs are disposed for each angular velocity sensor, then the detection accuracy is maintained, but the device complexity and mounting area are increased
Solution Approach 1:
The patent merges the drive circuits and control ICs into a shared resource that serves multiple angular velocity sensor elements. Since the vibration modes are made orthogonal and non-interfering through careful design of the mass portions and drive portions, a single drive circuit can control multiple sensor elements without cross-interference, thereby reducing circuit complexity and mounting area while preserving detection accuracy.
Solution Approach 2:
The patent introduces carefully designed coupling structures and isolation mechanisms that act as intermediaries between shared drive portions and multiple sensor elements. These intermediaries ensure that vibrations intended for one axis do not interfere with detection on other axes, allowing shared drive circuits to maintain detection accuracy across multiple axes.
3Adaptability or versatility
If multiple vibration modes are used in separate angular velocity sensors, then the multi-axis detection is achieved, but the vibration modes interfere with each other
Solution Approach 1:
The patent employs asymmetric design in the arrangement and orientation of mass portions and drive portions for different axes. The first mass portion is configured with specific geometric asymmetry that allows it to be driven in the first axis direction while its vibration mode is oriented such that it does not interfere with detection of the second axis. This asymmetric configuration ensures orthogonal vibration modes that do not interfere with each other.
Solution Approach 2:
The patent resolves vibration mode interference by utilizing different spatial dimensions and orientations. The first angular velocity sensor element detects rotation about the first axis with vibration in a specific plane, while the second angular velocity sensor element detects rotation about the second axis with vibration in a perpendicular plane. By separating the vibration modes into different dimensional orientations, the patent eliminates interference while achieving multi-axis detection.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration achieves miniaturization of the gyro sensor while enhancing detection accuracy and vibration efficiency, allowing for multi-axis detection with a common drive portion, thus overcoming the limitations of traditional designs.
Implementation Method 1
a force conversion portion fixed to an anchor portion, wherein the first mass portion and the second mass portion are connected with the force conversion portion, and the force conversion portion is displaced with the anchor portion as an axis, and vibrates the second mass portion in a direction of a second axis crossing the first axis in a plane view
Data Source
AI summary
A gyro sensor according to the invention includes a first mass portion including a first detection portion, a second mass portion including a second detection portion, first drive portions vibrating the first mass portion in a direction of a first axis, and a force conversion portion fixed to an anchor portion. The first mass portion and the second mass portion are connected with the force conversion portion. The force conversion portion is displaced with the anchor portion as an axis, and vibrates the second mass portion in a direction of a second axis crossing the first axis in a plane view.