Vibrating Gyro Sensor Frequency Ratio Optimization

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Solution Overview

Problem

Existing vibrating gyro sensors face challenges in maintaining detection sensitivity due to leakage outputs caused by imprecise processing and miniaturization, which can reduce mechanical strength and increase leakage outputs, leading to decreased detection sensitivity.

Innovation Solution

The design incorporates a vibrating element with a base, drive vibrating arms, detection vibrating arms, and adjustment vibrating arms, where the frequencies of these arms are adjusted to satisfy specific ratios to enhance vibration transmission efficiency and reduce leakage outputs, thereby improving detection sensitivity without compromising mechanical strength.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Volume of moving object

If the vibrating element is miniaturized to reduce size, then the device becomes more compact, but the mechanical strength decreases and leakage outputs increase

Engineering Contradiction:
Improvesize of vibrating elementVSAvoidmechanical strength
Core Design Contradiction:
Volume of moving objectVSStrength

Solution Approach 1:

The patent optimizes the frequency ratio parameter between drive and detection vibrating arms to satisfy a specific mathematical relationship. By controlling the frequency ratio within a predetermined range, the invention achieves effective leakage output suppression while maintaining the miniaturized structure's mechanical strength, resolving the contradiction between size reduction and strength maintenance

Inventive Principle:
Principle #35Parameter changes

2Ease of manufacture

If imprecise processing is used to simplify manufacturing, then the ease of manufacture increases, but leakage outputs occur and detection sensitivity decreases

Engineering Contradiction:
Improveprocessing precisionVSAvoiddetection sensitivity
Core Design Contradiction:
Ease of manufactureVSMeasurement precision

Solution Approach 1:

The invention transforms the manufacturing problem from requiring high precision to accepting normal precision by changing the frequency ratio parameter. By designing the vibrating arms with frequencies satisfying the predetermined ratio relationship, the system becomes tolerant to processing variations while maintaining high detection sensitivity, thus resolving the contradiction between ease of manufacture and measurement precision

Inventive Principle:
Principle #35Parameter changes

3Ease of manufacture

If the cross-sectional shape of vibrating arms deviates from rectangular due to etching anisotropy, then the ease of manufacture increases, but the vibration direction deviates and leakage output increases

Engineering Contradiction:
Improveetching processVSAvoidvibration direction
Core Design Contradiction:
Ease of manufactureVSStability of the object's composition

Solution Approach 1:

The patent compensates for the unstable vibration direction caused by etching anisotropy by optimizing the frequency ratio parameter between drive and detection arms. This parameter optimization ensures that even with non-rectangular cross-sections from anisotropic etching, the vibration directions remain properly aligned and leakage outputs are suppressed, resolving the contradiction between manufacturing ease and compositional stability

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration increases the detection sensitivity of the vibrating gyro sensor by optimizing the frequency ratios of the vibrating arms, reducing leakage outputs, and maintaining mechanical strength, resulting in stable and high-sensitivity angular velocity detection.

Implementation Method 1

a piezoelectric vibrating element (vibrating gyro device) made of quartz or any other piezoelectric material

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Implementation Method 2

detects an angular velocity in the form of an electric signal produced in part of the gyro vibrating element by swing, rotation, and other vibrating actions

Methodology Applied
Scientific EffectConverse piezoelectric effect: Converse Piezoelectric Effect

Implementation Method 3

When a drive signal (vibration excitation signal) is applied to the drive electrode to cause the vibrating arms to vibrate in a direction along the first surface (in-plane vibration), and the vibrating element is rotated around a detection axis extending in the direction in which the vibrating arms extend (for example, Y axis in the case of vibrating gyro device formed of quartz Z plate), the vibrating arms vibrate under a Coriolis force in the direction perpendicular to the first surface (out-of-plane vibration)

Methodology Applied
Scientific EffectCoriolis force: Coriolis Force

Implementation Method 4

the frequencies of natural vibration of the drive vibrating arm and the detection vibrating arm are made equal to each other, thereby making the drive vibrating arm and the detection vibrating arm resonate with each other

Methodology Applied
Scientific EffectResonance: Resonance

Data Source

PatentUS9093638B2Vibrating element, sensor unit and electronic apparatus
Publication Date: 2015.07.28 SEIKO EPSON CORP
  • US9093638B2 patent drawing
  • US9093638B2 patent drawing
  • US9093638B2 patent drawing

AI summary

A vibrating element includes a base, drive vibrating arms, detection vibrating arms, and adjustment vibrating arms. The drive vibrating arms are driven to make bending vibration in a predetermined plane. The following expressions (1) and (2) are satisfied:f3>f2  (1)0.964×(1−0.321(1+L/t))≦f2/f1≦0.995  (2)where t represents the thickness of the base, L represents the length of the base in the direction in which the drive vibrating arms extend, f1 represents the frequency of natural vibration of the detection vibrating arms in a direction that intersects the predetermined plane, f2 represents the frequency of natural vibration of the drive vibrating arms in a direction that intersects the predetermined plane, and f3 represents the frequency of natural vibration of the adjustment vibrating arms in a direction that intersects the predetermined plane.