Gyro Sensor Elastic Portion Laser Curving Reduces Quadrature
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Gyro sensors with asymmetric elastic portions due to machining errors experience increased quadrature signals, leading to deteriorated detection precision in angular velocity measurements.
Innovation Solution
The gyro sensor design incorporates an elastic portion with a curved connection surface, processed using a laser beam to form a curved surface portion, which reduces unwanted vibrations and quadrature signals, even when the elastic portion has an asymmetric shape like a parallelogram or trapezoid.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If dry etching is used to manufacture the sensor element, then manufacturing precision may be affected by machining errors, but the elastic portion can be formed with a simple process
Solution Approach 1:
The patent applies laser beam processing to change the physical state and shape of the elastic portion by controlling parameters such as laser power, scanning speed, and focal position. This transforms the elastic portion's cross-section from a non-circular shape (parallelogram or trapezoid) to a circular shape, resolving the shape accuracy issue caused by dry etching machining errors while maintaining process simplicity
2Device complexity
If the elastic portion has an asymmetric shape due to machining errors, then device complexity is reduced, but detection precision deteriorates due to increased quadrature signals
Solution Approach 1:
The patent uses laser beam processing to change the geometric parameters of the elastic portion, specifically transforming its cross-sectional shape to circular. This parameter change eliminates the asymmetric shape that causes quadrature signals, thereby improving angular velocity detection precision without complicating the device structure
Solution Approach 2:
The patent replaces the mechanical dry etching process with laser beam processing. This substitution allows for more precise control of the elastic portion's shape by using optical energy to melt and vaporize material, achieving circular cross-sections that reduce quadrature signals and improve detection precision
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration effectively minimizes the increase in quadrature signals, thereby enhancing detection precision and reliability in angular velocity sensing.
Implementation Method 1
processed using a laser beam to form a curved surface portion
Implementation Method 2
a mass portion that is connected to the driving portion and is displaced in the first direction; and an elastic portion that is connected to the mass portion and the fixed portion. The mass portion includes a detection portion that is displaceable in a second direction oriented along a second axis orthogonal to the first axis by a Coriolis force to act
Data Source
AI summary
A gyro sensor includes: a substrate; a fixed portion that is fixed to the substrate; a driving portion that is driven in a first direction oriented along a first axis; a mass portion that is connected to the driving portion and is displaced in the first direction; and an elastic portion that is connected to the mass portion and the fixed portion. The mass portion includes a detection portion that is displaceable in a second direction oriented along a second axis orthogonal to the first axis by a Coriolis force to act. An outer circumference surface of the elastic portion includes a main surface, a side surface, and a connection surface connecting the main surface to the side surface. The connection surface has a curved surface portion with a curved surface shape.