Gyro Sensor Vibration Leakage Cancellation via Anti-Phase Adjustment Arm
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Solution Overview
Problem
Vibrating reeds used in gyro sensors suffer from vibration leakage due to processing errors, leading to a deteriorated signal-to-noise ratio (S/N-ratio) and reduced mechanical strength, especially as they become smaller, making it difficult to improve processing accuracy.
Innovation Solution
Incorporating an adjustment vibrating arm with specific electrode configurations that generate anti-phase electrical signals to cancel out vibration leakage components, allowing for improved S/N-ratio without reducing mechanical strength or requiring precise cuts in the vibrating arms.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a cut is formed in the vibrating arm to remove vibration leakage component, then the S/N-ratio of output signal is improved, but the mechanical strength of the vibrating reed is reduced
Solution Approach 1:
An adjustment vibrating arm is introduced as an intermediary element that generates a counteracting vibration signal to cancel the vibration leakage component. This mediator approach allows removal of the harmful vibration leakage without physically cutting the main vibrating arm, thereby preserving mechanical strength while improving S/N-ratio
Solution Approach 2:
The adjustment vibrating arm is configured to generate a vibration signal that is opposite in phase to the vibration leakage component. By applying this preliminary anti-action, the vibration leakage is cancelled before it can degrade the output signal quality, eliminating the need for corrective cuts that would compromise structural integrity
2Measurement precision
If the vibrating reed is made smaller, then the sensitivity of the gyro sensor is improved, but the influence of processing errors on vibration leakage increases
Solution Approach 1:
The adjustment vibrating arm provides a feedback mechanism that compensates for vibration leakage caused by processing errors. By adjusting the phase and amplitude of the counteracting signal, the system can maintain high sensitivity in smaller vibrating reeds without being overly sensitive to manufacturing tolerances
Solution Approach 2:
The invention changes the parameters of the vibration system by introducing an additional vibrating arm with adjustable phase and amplitude characteristics. This allows the system to maintain optimal performance across different sizes and processing accuracies, enabling smaller vibrating reeds to achieve high sensitivity without requiring extremely precise manufacturing
3Shape
If masks are placed on the front surface and rear surface for cutting out the vibrating reed, then the shape of the vibrating arm is formed, but misalignment between masks causes the side surface to be tilted
Solution Approach 1:
The adjustment vibrating arm serves as a mediator that compensates for shape deviations caused by mask misalignment. Even when the main vibrating arm has slight tilts or shape errors, the adjustment arm generates a counteracting signal that corrects the vibration leakage, allowing acceptable manufacturing tolerances while maintaining measurement accuracy
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively cancels out vibration leakage components, enhancing the S/N-ratio of the output signal while maintaining mechanical strength and avoiding the need for precise cuts in the vibrating arms, thus improving the performance of gyro sensors.
Implementation Method 1
a first adjustment electrode provided on the adjustment vibrating arm and generating an electrical signal in first phase, a second adjustment electrode provided on the adjustment vibrating arm and generating an electrical signal in second phase opposite to the first phase
Implementation Method 2
When angular velocity motion is applied to a drive vibrating arm, the vibration direction of the drive vibrating arm changes due to action of Coriolis force
Data Source
AI summary
A vibrating reed includes a base part. A drive vibrating arm, a detection vibrating arm, and an adjustment vibrating arm extend from the base part. A first adjustment electrode and a second adjustment electrode are connected to the adjustment vibrating arm. The first adjustment electrode generates an electrical signal in first phase. The second adjustment electrode generates an electrical signal in second phase opposite to the first phase. The electrical signals of the adjustment electrodes are superimposed on the detection signal of the detection vibrating arm, and thereby, vibration leakage components are cancelled out. The adjustment vibrating arm is partially sandwiched between a first electrode piece and a second electrode piece, and the adjustment vibrating arm is partially sandwiched between a third electrode piece and a fourth electrode piece.


