Gyroscope Structure Using Flexible Elements for Three-Axis Detection
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Solution Overview
Problem
Conventional capacitive vibrating gyroscopes require complex structures and larger chip sizes due to multiple mass blocks, resulting in increased volume and space-occupying costs.
Innovation Solution
A gyroscope structure with a frame on a substrate, using flexible elements to connect plates and a rotating plate pivotally connected through holes, with sensing elements on the substrate to detect linear and angular motion, reducing overall volume by eliminating the need for additional mass blocks and frames.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If conventional capacitive vibrating gyroscopes use at least four mass blocks to achieve three-axle detection, then the detection capability is improved, but the structure becomes complicated and the chip size increases
Solution Approach 1:
The patent combines multiple mass blocks into a single integrated mass block structure. The first, second, and third plates are connected through flexible elements to form one unified mass block that can detect motion in three orthogonal directions, eliminating the need for separate mass blocks for each axis while maintaining three-axle detection capability
Solution Approach 2:
The single mass block is designed to perform multiple functions simultaneously - it can detect angular velocity around three different orthogonal axes and linear acceleration, serving as a multi-functional sensing element that replaces what would traditionally require multiple separate mass blocks
2Adaptability or versatility
If conventional capacitive vibrating gyroscopes use at least four mass blocks for three-axle detection, then the detection capability is improved, but the chip size becomes larger
Solution Approach 1:
The patent merges multiple mass blocks into a single integrated structure where the first, second, and third plates are connected through flexible elements. This consolidation significantly reduces the space required on the chip while maintaining the ability to detect motion in three orthogonal directions
Solution Approach 2:
The patent utilizes three-dimensional spatial arrangement of the flexible elements and plates, where the first, second, and third plates are positioned at different orientations and connected through flexible elements that allow motion in multiple dimensions, enabling three-axle detection in a compact footprint
3Adaptability or versatility
If conventional capacitive vibrating gyroscopes use an extra driving frame to enable vibration in two different directions, then the vibration capability is improved, but the overall structure becomes larger and requires bigger chip size
Solution Approach 1:
The patent uses flexible elements (flexures) to connect the first, second, and third plates. These flexible elements enable the mass block to vibrate in two different directions (corresponding to three-axle detection) without requiring an extra driving frame, thereby reducing the overall structure volume while maintaining the required vibration capabilities
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The structure achieves volume reduction and cost savings by enabling three-axis detection with fewer components, maintaining stable performance and reliability while minimizing space occupation.
Implementation Method 1
a first outer edge of the first plate is connected to one end of a first flexible element and one end of a second flexible element, the other end of the first flexible element is set at an inner edge of the frame
Implementation Method 2
sensing elements are equipped corresponding to the plates on the substrate to detect the linear and angular moving of the plates
Implementation Method 3
a rotating plate is pivotally connected in the through-hole
Data Source
AI summary
The present invention provides a gyroscope structure. A frame disposed on a substrate, and a flexible element is correspondingly disposed a first, second, and third plate. The first plate has a second flexibility. The second plate is connected to the second plate, the second plate is connected to the third plate with a fourth flexible element, the second plate is provided with a first through-hole, and a rotating plate is pivotally connected in the first through-hole. The rotating plate is connected to a supporting column of the substrate by a fifth flexible part, and then a sensing element is provided on the substrate corresponding to the first, second, and third plates to sense the movement and movement of the plates. Rotating, in one embodiment, the first and third plates are provided with through-holes, and corresponding sensing elements and driving elements are provided.