Micro-Shell Gyroscope Vacuum Laser Trimming for Frequency Matching

The patent replaces manual mechanical trimming operations with automated laser etching technology. The laser etching module uses optical energy to precisely remove material from the resonant structure, eliminating the need for mechanical contact and manual adjustment. This substitution enables non-contact, high-precision trimming with consistent results, resolving the contradiction between manufacturing precision and productivity by automating the process while maintaining or improving accuracy.

The patent implements real-time frequency parameter monitoring and feedback control during the trimming process. The mode test circuit module continuously measures the frequency split, and the system dynamically adjusts laser etching parameters (power, duration, position) based on the measured frequency deviation. This closed-loop parameter control enables precise frequency matching while optimizing trimming efficiency, as the process adapts to actual conditions rather than relying on pre-programmed mechanical sequences.

The patent merges the trimming process with the testing process by integrating both operations within the same vacuum chamber. The laser etching module and mode test circuit module coexist in the vacuum environment, allowing frequency measurement and material removal to occur sequentially or simultaneously without exposing the gyroscope to external environmental changes. This consolidation eliminates transport-related accuracy degradation while the vacuum environment protects the sensitive resonant structure throughout the entire process.

The patent utilizes a vacuum environment as an inert atmosphere to isolate the gyroscope from environmental factors such as air pressure changes, temperature fluctuations, and contamination during the trimming process. The vacuum chamber maintains stable conditions that prevent frequency drift and ensure consistent trimming results, justifying the increased device complexity by providing a controlled environment that guarantees manufacturing precision.

The patent implements a feedback control system where the mode test circuit module continuously monitors the frequency split during the trimming process. The measured frequency deviation is fed back to control the laser etching module, which adjusts its operation to reduce the frequency split. This real-time feedback loop enables precise frequency matching by dynamically responding to actual conditions, resolving the contradiction by showing that the monitoring complexity is necessary to achieve the desired manufacturing precision.

The system performs self-adjustment through automated feedback control, where the trimming process automatically corrects frequency deviations without external intervention. The mode test circuit module detects frequency split, and the control system automatically adjusts laser etching parameters to eliminate the deviation. This self-service capability achieves high precision frequency matching while reducing the need for manual operation and external calibration equipment.