Micromechanical Gyroscope Resonance Frequency Matching

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Solution Overview

Problem

Microelectromechanical gyroscope devices face challenges in achieving accurate angular velocity sensing due to the trade-off between signal sensitivity and noise amplification, which is influenced by the separation of primary and secondary resonant frequencies, leading to instability and reduced robustness.

Innovation Solution

The implementation of a strongly damped feed-back loop to control the secondary resonator, allowing the primary and secondary frequencies to coincide, thereby improving signal levels with minimal additional device components.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the primary and secondary resonant frequencies are separated to reduce sensitivity to external vibrations, then stability over environmental changes is improved, but the detected amplitude becomes relatively low leading to poor signal-to-noise ratio

Engineering Contradiction:
Improvestability over environmental changesVSAvoidsignal-to-noise ratio
Core Design Contradiction:
ReliabilityVSMeasurement precision

Solution Approach 1:

The patent applies parameter changes by dynamically adjusting the resonant frequency of the secondary resonator to match the primary resonator's frequency. This frequency matching parameter change enables resonance gain amplification of the Coriolis signal, dramatically improving the signal-to-noise ratio while maintaining environmental stability through the feedback control mechanism

Inventive Principle:
Principle #35Parameter changes

2Measurement precision

If the primary and secondary resonant frequencies are brought closer to amplify Coriolis movement, then signal-to-noise ratio is improved, but sensitivity to external and internal factors increases requiring added mechanical structures

Engineering Contradiction:
Improvesignal-to-noise ratioVSAvoidmechanical structures for sensitivity management
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent implements feedback control by continuously monitoring the secondary resonator's response and adjusting its resonant frequency to match the primary resonator. This active feedback mechanism achieves frequency matching and resonance gain without requiring additional mechanical structures, thereby improving signal-to-noise ratio while maintaining device simplicity and robustness

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The patent replaces passive mechanical frequency-matching structures with an active electronic feedback control system. Instead of using complex mechanical arrangements to maintain frequency alignment, the invention uses electronic sensing and actuation to dynamically adjust the secondary resonator's frequency, substituting mechanical complexity with electronic control

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Measurement precision

If excessive quality factor is used in the sensing system to amplify resonant peak, then signal amplification is achieved, but susceptibility to shock and fabrication differences increases

Engineering Contradiction:
Improveresonant peak amplificationVSAvoidsusceptibility to shock and fabrication differences
Core Design Contradiction:
Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

The patent employs feedback control to manage the quality factor of the sensing system. By actively regulating the resonant response through feedback, the system achieves optimal resonant peak amplification for signal detection while preventing excessive quality factor that would increase susceptibility to shock and fabrication variations, thus balancing signal amplification with robustness

Inventive Principle:
Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach significantly enhances the signal-to-noise ratio and reduces sensitivity to external vibrations, achieving improved zero-point stability and robustness without increasing the device's complexity.

Implementation Method 1

a second mechanical resonator coupled to the first mechanical resonator to produce associated sense mode vibration in a direction that is perpendicular to the direction of the drive mode vibration

Methodology Applied
Scientific EffectCoriolis force: Coriolis Force

Implementation Method 2

a feed-back loop connected to the second mechanical resonator and adjusted to damp the sense mode vibration of this second resonator

Methodology Applied
Scientific EffectDamping: Damping

Implementation Method 3

The resonance frequencies of the first and second mechanical resonators are adjusted to essentially coincide

Methodology Applied
Scientific EffectResonance: Resonance

Data Source

PatentEP3279608B1Improved vibratory gyroscope
Publication Date: 2019.05.22 MURATA MFG CO LTD
  • EP3279608B1 patent drawingFigure 1~2
  • EP3279608B1 patent drawingFigure 3~4
  • EP3279608B1 patent drawingFigure 5~6

AI summary

A sensing device comprising a micromechanical gyroscope, the gyroscope comprising: An improved sensing device with a micromechanical gyroscope, where the resonance frequency of the first mechanical resonator and the resonance frequency of the second mechanical resonator are adjusted to essentially coincide. The device comprises a feed-back loop connected to the second mechanical resonator, the quality factor of the combination of the feed-back loop and the second mechanical resonator being less than 10. More accurate sensing is achieved without essentially adding complexity to the sensor device configuration.