Vibrating Gyroscope with Segmented Electrodes for Angular Velocity Detection
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Solution Overview
Problem
Conventional vibrating gyroscopes with piezoelectric films face challenges in reducing size and improving performance, particularly in detecting angular velocity accurately due to signal weakening from external impacts, leading to difficulties in distinguishing between intended signals and noise.
Innovation Solution
A ring-shaped vibrating gyroscope with a unique electrode configuration, including driving, detection, and suppression electrodes, is designed to excite and detect primary and secondary vibrations using a piezoelectric film, enhancing processing accuracy and signal-to-noise ratio through a dry process technique.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If the gyroscope is reduced in size, then the miniaturization requirement is satisfied, but the detection accuracy deteriorates due to signal weakening from external impacts
Solution Approach 1:
The detection system is segmented into multiple independent detection electrodes positioned at different locations on the vibrating body. This allows the gyroscope to detect angular velocity while being less susceptible to external impacts, as the segmented detection approach can distinguish between genuine rotational signals and impact-induced vibrations, thereby maintaining detection accuracy in a miniaturized configuration
Solution Approach 2:
The patent implements feedback mechanisms where detection electrode signals are processed and fed back to adjust the driving signals. This feedback system enables the miniaturized gyroscope to compensate for signal weakening caused by external impacts, maintaining detection accuracy by dynamically adjusting to distinguish between impact noise and genuine angular velocity signals
2Manufacturing precision
If a piezoelectric film is used to excite and detect vibrations, then the processing accuracy can be improved, but the device complexity increases due to the need for precise film formation and electrode configuration
Solution Approach 1:
The piezoelectric film serves multiple functions simultaneously: it acts as both the actuator for exciting vibrations and the sensor for detecting vibrations. This multi-functionality reduces device complexity by eliminating the need for separate piezoelectric actuators and sensors, while maintaining high manufacturing precision through a single integrated film structure
Solution Approach 2:
The patent merges the driving electrode and detection electrode functions into a single integrated electrode structure that works in conjunction with the piezoelectric film. This combining of functions simplifies the overall device configuration while maintaining the precision needed for accurate vibration excitation and detection
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The configuration significantly improves the signal-to-noise ratio and responsiveness of the vibrating gyroscope, enabling more accurate detection of angular velocity while maintaining high processing accuracy and flexibility in vibration modes.
Implementation Method 1
a piezoelectric film formed on a vibrating body... by using a PZT film as a piezoelectric material, exciting a primary vibration of a vibrating body
Implementation Method 2
detecting partial distortion of a gyroscope, which is caused by a coriolis force generated to the vibrating body
Implementation Method 3
a coriolis force generated to the vibrating body when an angular velocity is applied to the vibrating body
Data Source
AI summary
A vibratory gyro which is provided with a ring-shaped vibrating body, leg portions flexibly supporting the ring-shaped vibrating body, a plurality of electrodes formed by having a piezoelectric film sandwiched between an upper-layer metallic film and a lower-layer metallic film in the thickness direction, and a fixed potential electrode. The plurality of electrodes include a bank of driving electrodes for exciting primary vibration, detection electrodes for detecting secondary vibration, and suppression electrodes for suppressing the secondary vibration on the basis of a voltage signal from the detection electrodes. The driving electrodes, the detection electrodes and the suppression electrodes are disposed in the region from an outer peripheral edge of the ring-shaped vibrating body to a vicinity of the outer peripheral edge and/or a region from an inner peripheral edge thereof to a vicinity of the inner peripheral edge.


