Hall Effect Sensor Devices Reducing Offset Voltage

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Solution Overview

Problem

Existing Hall effect sensor devices suffer from high signal-to-noise ratios and offset/residual voltages due to resistance mismatch between different regions caused by varying depletion widths of p-n junctions, which are sensitive to temperature changes and external voltages.

Innovation Solution

A Hall effect sensor device with a base layer of one conductivity type, a Hall plate region of opposite conductivity type, and isolating regions made of electrically insulating material, where the Hall plate region is surrounded by a first isolating region and contains second isolating regions that electrically isolate terminal regions, reducing current flow and p-n junctions.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If intermediate regions of opposite conductivity type are arranged between neighboring terminals, then the Hall plate structure is formed, but resistance mismatch occurs due to varying depletion widths of p-n junctions

Engineering Contradiction:
ImproveHall plate structureVSAvoidresistance mismatch
Core Design Contradiction:
Device complexityVSManufacturing precision

Solution Approach 1:

The patent removes the intermediate regions of opposite conductivity type from between the terminals. By extracting these problematic p-n junctions, the design eliminates the source of varying depletion widths that cause resistance mismatch, while still maintaining the necessary Hall plate functionality through alternative terminal configurations.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent applies different conductivity type regions selectively at specific locations rather than uniformly throughout. By placing intermediate regions only where needed for specific terminal isolation or protection, rather than between all terminal pairs, the design achieves local optimization that reduces overall resistance mismatch while maintaining necessary structural integrity.

Inventive Principle:
Principle #3Local quality

2Device complexity

If intermediate regions are arranged between terminals, then the Hall plate is formed, but signal-to-noise ratio and offset voltage increase due to depletion width variations

Engineering Contradiction:
ImproveHall plate structureVSAvoidsignal-to-noise ratio
Core Design Contradiction:
Device complexityVSMeasurement precision

Solution Approach 1:

The patent extracts and removes the intermediate regions that create problematic p-n junctions between terminals. By eliminating these regions, the design removes the source of depletion width variations that degrade signal-to-noise ratio and increase offset voltage, thereby improving measurement precision.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent changes the conductivity type parameters of the intermediate regions to match the Hall plate conductivity type rather than using opposite conductivity types. This parameter change eliminates the formation of p-n junctions and their associated depletion widths, directly improving signal-to-noise ratio and reducing offset voltage.

Inventive Principle:
Principle #35Parameter changes

3Device complexity

If p-n junctions are present in the Hall plate, then the intermediate regions are formed, but sensitivity to temperature changes and external voltages increases

Engineering Contradiction:
Improveintermediate regionsVSAvoidtemperature sensitivity
Core Design Contradiction:
Device complexityVSStability of the object's composition

Solution Approach 1:

The patent removes the intermediate regions of opposite conductivity type that create temperature-sensitive p-n junctions. By extracting these regions, the design eliminates the primary source of temperature sensitivity and voltage dependence, improving the stability of the Hall plate's electrical characteristics under varying environmental conditions.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent changes the conductivity type of intermediate regions to match the Hall plate, transforming them from p-n junction interfaces to homotype regions. This parameter change eliminates the temperature and voltage sensitivity associated with depletion width variations in p-n junctions, stabilizing the device composition.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration minimizes resistance mismatch, reduces sensitivity to temperature changes and external voltages, and lowers offset voltage, improving the device's signal quality and accuracy in measuring magnetic fields.

Implementation Method 1

In the presence of a magnetic field perpendicular to the plane of the Hall plate, Lorentz forces may be exerted on the charge carriers in the electric currents. This may produce a Hall voltage within the Hall plate.

Methodology Applied
Scientific EffectHall effect: Hall Effect

Implementation Method 2

In the presence of a magnetic field perpendicular to the plane of the Hall plate, Lorentz forces may be exerted on the charge carriers in the electric currents.

Methodology Applied
Scientific EffectLorentz force: Lorentz Force

Data Source

PatentUS11372061B2Hall effect sensor devices and methods of forming hall effect sensor devices
Publication Date: 2022.06.28 GLOBALFOUNDRIES SINGAPORE PTE LTD
  • US11372061B2 patent drawing
  • US11372061B2 patent drawing
  • US11372061B2 patent drawing

AI summary

A Hall effect sensor device may be provided, including one or more sensor structures. Each sensor structure may include: a base layer having a first conductivity type; a Hall plate region having a second conductivity type opposite from the first conductivity type arranged above the base layer; a first isolating region arranged around and adjoining the Hall plate region, and contacting the base layer; a plurality of second isolating regions arranged within the Hall plate region; and a plurality of terminal regions arranged within the Hall plate region. The first and second isolating regions may include electrically insulating material, and each neighboring pair of terminal regions may be electrically isolated from each other by one of the second isolating regions.