Hall Effect Sensor Drive Current Compensation via Vertical Epi Resistors

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Solution Overview

Problem

Hall effect elements experience sensitivity changes due to stresses on the substrate, which can vary with temperature and material properties, leading to unstable differential output signals, and existing technologies lack effective compensation methods for these changes.

Innovation Solution

An electronic circuit is designed with a semiconductor substrate and epitaxial layer, incorporating Hall effect elements and vertical epi resistors that adjust drive currents based on substrate stress, using epitaxial layer resistances to compensate for sensitivity changes by modifying the resistance in response to stress, thereby stabilizing the output signal.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If Hall effect elements are used for magnetic field sensing, then magnetic field detection capability is achieved, but sensitivity changes occur due to substrate stress

Engineering Contradiction:
Improvemagnetic field sensing accuracyVSAvoidsensitivity stability
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

The patent implements feedback by using vertical epi resistors to sense substrate stress and automatically adjusting the drive current to Hall effect elements based on the stress level. The resistor value changes with stress, creating a feedback loop that compensates for sensitivity drift by modulating the drive current accordingly, thus maintaining stable output despite stress variations

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The patent changes the drive current parameter dynamically in response to substrate stress. By adjusting the magnitude of the drive current based on stress-induced resistance changes in the vertical epi resistors, the system compensates for sensitivity variations in the Hall effect elements, maintaining measurement accuracy under varying stress conditions

Inventive Principle:
Principle #35Parameter changes

2Measurement precision

If drive current is increased to improve signal amplitude, then sensitivity increases, but sensitivity becomes more susceptible to stress-induced changes

Engineering Contradiction:
Improvedifferential output signal amplitudeVSAvoidsensitivity consistency
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

The vertical epi resistors provide real-time feedback on substrate stress conditions, enabling the system to adjust the drive current dynamically. This feedback mechanism ensures that the drive current is optimized for both signal amplitude and stress compensation, maintaining sensitivity consistency while achieving adequate output signal levels

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The patent transitions from a static drive current approach to a dynamic one where the drive current automatically adjusts in response to substrate stress. The vertical epi resistors enable this dynamic adaptation, allowing the system to optimize performance under varying stress conditions rather than being fixed at a single current level

Inventive Principle:
Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively compensates for sensitivity changes caused by substrate stress, maintaining stable and accurate magnetic field sensing by adjusting drive currents in response to stress-induced resistance changes, thus enhancing the reliability of Hall effect sensors.

Implementation Method 1

the resistance of the vertical epi resistor, the reference current, and the drive current change in accordance with changes of a stress in the semiconductor substrate

Methodology Applied
Scientific EffectPiezoresistive effect: Piezoresistive Effect

Implementation Method 2

a differential voltage (AC or DC), responsive to a magnetic field (AC or DC), is generated between the other two opposing ones of the four terminals

Methodology Applied
Scientific EffectHall effect: Hall Effect

Data Source

PatentUS10520559B2Arrangements for Hall effect elements and vertical epi resistors upon a substrate
Publication Date: 2019.12.31 ALLEGRO MICROSYSTEMS LLC
  • US10520559B2 patent drawing
  • US10520559B2 patent drawing
  • US10520559B2 patent drawing

AI summary

Hall effect elements are driven by current generators that use vertical epi resistors disposed away from an edge of a substrate upon which, within which, or over which, the Hall effect elements, the current generators, and the vertical epi resistors are disposed.