Hall Element Position Accuracy via Temperature Compensation

Resolve Bottlenecks,
Find Innovative SolutionsGenerate Solutions

Solution Overview

Problem

Existing substrate transfer devices face challenges in maintaining high position alignment accuracy due to temperature-induced sensitivity changes in Hall elements, which affect the magnetic flux density detection and subsequent positioning of the transfer section, particularly in accuracy-required areas.

Innovation Solution

Incorporating temperature sensors to detect and compensate for temperature variations in Hall elements, allowing the controller to estimate and adjust for temperature-induced shifts in magnetic flux density measurements, thereby improving the accuracy of position estimation and alignment.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If Hall elements are used for position detection in the substrate transfer device, then position detection capability is provided, but temperature-induced sensitivity changes cause position alignment accuracy to deteriorate

Engineering Contradiction:

Improveposition detection accuracyVSAvoidposition alignment accuracy

Core Design Contradiction:

Measurement precisionVSReliability

Solution Approach 1:

The patent implements a feedback mechanism where temperature sensors continuously monitor the temperature of Hall elements, and the controller uses this temperature information to calculate compensation values. These compensation values are applied to correct the output signals from Hall elements, forming a closed-loop feedback system that maintains measurement accuracy despite temperature variations.

Inventive Principle:

Principle #23Feedback

Solution Approach 2:

The patent changes the operational parameters of Hall elements by applying temperature compensation. The controller calculates compensation values based on temperature sensor readings and adjusts the interpretation of Hall element output signals accordingly. This parameter adjustment compensates for temperature-induced sensitivity changes without requiring physical modification of the Hall elements.

Inventive Principle:

Principle #35Parameter changes

2Measurement precision

If temperature compensation is implemented using temperature sensors and controller calculations, then position alignment accuracy is improved, but device complexity increases

Engineering Contradiction:

Improveposition alignment accuracyVSAvoidsystem complexity

Core Design Contradiction:

Measurement precisionVSDevice complexity

Solution Approach 1:

The patent introduces temperature sensors as intermediary components that mediate between the physical temperature environment and the Hall element measurements. These sensors provide temperature information to the controller, which then uses this intermediate data to calculate compensation values. This intermediary approach allows indirect compensation without requiring direct modification of the Hall element characteristics.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent replaces potential mechanical or physical compensation methods with an electronic/software-based solution. Instead of using mechanical adjustments or physical compensators, the system uses temperature sensor readings processed by a controller to calculate and apply compensation values algorithmically. This substitution reduces mechanical complexity while achieving the compensation goal.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enhances the position alignment accuracy of the transfer section by accurately accounting for temperature effects on Hall element sensitivity, ensuring precise substrate placement and handling in both accuracy-required and transfer areas.

Implementation Method 1

a tile-shaped section that includes a coil and a Hall element... a transfer section that includes a permanent magnet and that is configured to move over the tile-shaped section... the controller is configured to estimate a position of the transfer section based on a temperature of the Hall element and a detection value of the Hall element

Methodology Applied

Scientific EffectHall effect: Hall Effect

Implementation Method 2

a temperature sensor configured to detect a temperature in the tile-shaped section... The temperature of the Hall element is determined based on the temperature detected by the temperature sensor

Methodology Applied

Scientific EffectTemperature detection:

Implementation Method 3

a transfer section that includes a permanent magnet and that is configured to move over the tile-shaped section

Methodology Applied

Scientific EffectMagnetic field generation: Magnetic Field

Data Source

PatentUS20230166924A1Substrate transfer device and substrate transfer method

Publication Date: 2023.06.01 TOKYO ELECTRON LTD

AI summary

A substrate transfer device includes a tile-shaped section that includes a coil and a Hall element and that is provided in a transfer chamber, a transfer section that includes a permanent magnet and that is configured to move over the tile-shaped section to transfer a substrate, a temperature sensor configured to detect a temperature in the tile-shaped section, and a controller configured to estimate a position of the transfer section based on a temperature of the Hall element and a detection value of the Hall element. The temperature of the Hall element is determined based on the temperature detected by the temperature sensor.