Hall Sensor Planar Motor Positioning Without Mechanical Transmission
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Solution Overview
Problem
Traditional displacement devices in precision motion systems, such as those used in the semiconductor industry, often require multiple levels to achieve multi-axis motion, which can be cumbersome and limit positioning accuracy and efficiency, especially in applications requiring high precision and large strokes.
Innovation Solution
A displacement device combining Hall-effect sensors and planar motors, where a magnet array on the stator and a coil array on the mover interact to enable six degrees of freedom motion, with a Hall-effect sensor array installed on the mover to provide real-time displacement feedback, allowing for accurate positioning and motion control without mechanical friction or wear.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If traditional multi-level displacement devices are used to achieve multi-axis motion, then motion capability is provided, but positioning accuracy and movement efficiency deteriorate due to mechanical friction and intermediate transmission links
Solution Approach 1:
The patent replaces traditional mechanical transmission systems with a planar motor system that uses electromagnetic interaction between a magnet array and coil array to generate Lorentz force for direct drive motion. This eliminates mechanical friction, intermediate transmission links, and associated wear, thereby improving positioning accuracy and movement efficiency while reducing structural complexity
Solution Approach 2:
The patent integrates multiple functions into a single planar motor structure that simultaneously provides multi-axis motion capability and real-time displacement measurement. The magnet array, coil array, and Hall-effect sensor array are combined in one integrated system, eliminating the need for separate mechanical transmission components and improving overall system efficiency
2Productivity
If mechanical transmission systems are used for multi-axis motion, then motion capability is achieved, but movement efficiency and acceleration performance worsen due to mechanical friction and recoil
Solution Approach 1:
The patent replaces mechanical transmission systems with electromagnetic direct drive using planar motors. The Lorentz force generated by the interaction between the magnet array and coil array provides frictionless motion, eliminating mechanical wear and recoil, thereby improving movement efficiency and acceleration performance
Solution Approach 2:
The system uses Hall-effect sensors installed on the mover to autonomously measure real-time displacement and provide feedback signals for closed-loop control, eliminating the need for external mechanical measurement systems and improving system reliability
3Measurement precision
If intermediate transmission links are used in displacement devices, then motion transmission is achieved, but positioning accuracy and structural rigidity worsen
Solution Approach 1:
The patent removes intermediate transmission links from the system by implementing direct electromagnetic drive. The planar motor structure eliminates mechanical gears, belts, or linkages that would compromise positioning accuracy and structural rigidity, achieving a compact design with no mechanical friction or recoil
Solution Approach 2:
The patent combines the drive function and measurement function into an integrated planar motor system. The magnet array and coil array provide direct electromagnetic drive while Hall-effect sensors provide real-time feedback, eliminating the need for separate mechanical transmission and measurement components
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enhances positioning accuracy and motion acceleration, reduces mechanical constraints, and improves movement efficiency by enabling direct drive and magnetic levitation, suitable for microelectronic equipment requiring high precision and large strokes.
Implementation Method 1
It is based on the principle of Lorentz force and applies the produced electromagnetic force directly to the work table, thereby providing multi-axis motions
Implementation Method 2
a real-time displacement measurement system is required, so as to provide a displacement feedback signal to the closed-loop control
Data Source
AI summary
The present invention discloses a displacement device based on Hall-effect sensors and planar motors. The device at least comprises a planar motor stator, a planar motor mover, and a Hall-effect sensor array, a magnet array on the planar motor stator extends on a first plane substantially parallel to a direction X and a direction Y to form a working area, a coil array on the planar motor mover is configured on a second plane parallel to the first plane, an interaction between the coil array and the magnet array causes the planar motor mover to produce a displacement of at least two degrees of freedom within the working area, the magnet array is configured by first magnet blocks and second magnet blocks alternately in rows and columns, the Hall-effect sensor array is composed of a plurality of Hall-effect sensors, and installed on the planar motor mover, a size of the magnet blocks of the magnet array in the direction X is not less than twice a column spacing of the Hall-effect sensor array, and the size of the magnet blocks of the magnet array in the direction Y is not less than twice a row spacing of the Hall-effect sensor array.