Sulfuric Acid Cleaning System with Halogen Lamp Heating
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Solution Overview
Problem
The existing cleaning systems for electronic materials face challenges with premature self-decomposition of peroxosulfuric acid at high temperatures, leading to reduced cleaning efficiency and increased pressure risks due to brittle materials in rapid heating heaters, and limited installation flexibility in clean rooms with restricted space.
Innovation Solution
A cleaning system with an electrolytic part for producing peroxosulfuric acid, a circulation line, a cleaning apparatus, and a heating part positioned above the electrolytic part, allowing for continuous production and reduced pressure transmission, using conductive diamond electrodes and controlled temperature ranges to enhance efficiency and safety.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the temperature of the cleaning liquid is raised to promote resist stripping, then the cleaning efficiency is improved, but the peroxosulfuric acid self-decomposes prematurely and the cleaning liquid is consumed
Solution Approach 1:
The system performs preliminary heating of the sulfuric acid solution before electrolysis to generate peroxosulfuric acid. By heating the base solution first and then conducting electrolysis at a controlled temperature, the system avoids premature decomposition while still achieving the necessary temperature for effective cleaning. This sequential approach ensures peroxosulfuric acid is generated and used at the optimal moment.
Solution Approach 2:
The system dynamically adjusts the temperature throughout the cleaning process. The sulfuric acid solution is heated to a first temperature for electrolysis, then the generated peroxosulfuric acid solution is heated to a second, higher temperature for cleaning. This dynamic temperature management allows the system to optimize both peroxosulfuric acid generation and cleaning effectiveness while minimizing decomposition losses.
2Speed
If a rapid heating heater with quartz flow passage is used to heat the cleaning liquid quickly, then the temperature rise speed is improved, but the feeding pressure causes breakage of the heater
Solution Approach 1:
The system replaces the conventional rapid heating heater with a halogen lamp heating system. Instead of using a mechanical heater that requires high feeding pressure and uses brittle quartz components, the halogen lamp provides rapid heating through radiant energy. This substitution eliminates the mechanical pressure issues and structural vulnerabilities while maintaining fast heating capability.
Solution Approach 2:
The system changes the heating method from contact-based electrical heating to non-contact radiant heating. The halogen lamp emits infrared radiation that directly heats the sulfuric acid solution without requiring high feeding pressure or complex flow passages. This parameter change in the heating mechanism fundamentally resolves the pressure-induced breakage problem.
3Adaptability or versatility
If the cleaning system is installed in a clean room with limited space, then the installation location is constrained, but the system requires flexible installation positions
Solution Approach 1:
The system transitions from a ground-level installation to a suspended ceiling-mounted installation. By utilizing the vertical dimension and mounting the sulfuric acid solution storage tank and halogen lamp in the clean room ceiling, the system frees up floor space while maintaining all necessary functions. This dimensional change allows flexible installation in space-constrained environments.
Solution Approach 2:
The system uses a compact, integrated design where the storage tank and heating elements are combined in a space-efficient configuration. The suspended tank design with integrated halogen lamp heating creates a compact unit that can be installed in limited ceiling spaces, effectively copying the essential functions in a reduced footprint suitable for clean rooms.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system ensures efficient production and use of peroxosulfuric acid with reduced pressure and energy consumption, allowing for safe and effective cleaning of electronic materials even in limited clean room spaces, with extended halogen lamp life and reduced energy costs.
Implementation Method 1
electrolyzing a sulfuric acid solution to produce peroxosulfuric acid
Implementation Method 2
rapid heating heater
Implementation Method 3
the peroxosulfuric acid in the cleaning liquid self-decomposes to generate a sulfuric radical with extremely high oxidative power
Data Source
AI summary
Provided are a system and method capable of providing a sulfuric acid solution containing peroxosulfuric acid for use in cleaning even in an installation-limited space such as a clean room while suppressing the fluid pressure in a heating part such as a rapid heating heater.The system comprises: an electrolytic part for electrolyzing a sulfuric acid solution to produce peroxosulfuric acid; a first reservoir for storing the sulfuric acid solution; a circulation line for circulating the sulfuric acid solution between the electrolytic part and the first reservoir; a cleaning apparatus for cleaning a cleaning object by use of the sulfuric acid solution containing peroxosulfuric acid; a supply line for sending the sulfuric acid solution electrolyzed in the electrolytic part to the cleaning apparatus; a heating part for heating the sulfuric acid solution to be used in the cleaning apparatus, the heating part being interposed in the supply line on the upstream side of the cleaning apparatus; and a second reservoir which is interposed in the supply line on the upstream side of the heating part. Since the second reservoir and the heating parts are positioned spatially above the level of the first reservoir, the electrolytic part and the circulation line, the device can be disposed with good space efficiency while preventing application of a high fluid pressure to the heating part or the like.