Tungsten Halogen Lamp J-Hook Geometry for Filament Retention

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Solution Overview

Problem

Conventional filament supports in lamps used for epitaxial processing are prone to premature failure due to inadequate structural support, leading to filament dislodgment during shipping and operation, resulting in costly downtime and reduced lamp lifespan.

Innovation Solution

The design incorporates filament supports with a hook structure featuring a second vertical portion that is between 60% and 100% the length of the first vertical portion, providing enhanced stability and reducing the likelihood of filament dislodgment, while maintaining efficient heating performance by minimizing light obstruction and contact with the filament.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional filament supports with short second vertical portions are used, then the lamp structure is simpler and easier to manufacture, but the filament becomes prone to dislodgment during shipping and operation

Engineering Contradiction:
Improvefilament support stabilityVSAvoidfilament support structure
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent applies parameter changes by modifying the length ratio between the first and second vertical portions of the J-hook filament support. Specifically, the second vertical portion is extended to be between 60%-100% of the length of the first vertical portion, which significantly improves filament retention and prevents dislodgment during shipping and operation, while maintaining manufacturing feasibility

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent enhances the filament support structure by adding dimensional extension to the second vertical portion of the J-hook. This dimensional change provides additional structural support and creates a more stable geometry that better retains the filament in position without overly complicating the overall design

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Reliability

If filament supports with longer second vertical portions are used, then filament dislodgment is reduced, but light obstruction and contact with the filament increase

Engineering Contradiction:
Improvefilament retentionVSAvoidlight distribution
Core Design Contradiction:
ReliabilityVSIllumination intensity

Solution Approach 1:

The patent optimizes the length parameter of the second vertical portion to be between 60%-100% of the first vertical portion's length. This specific parameter range achieves the optimal balance: it provides sufficient filament retention and structural stability while minimizing light obstruction and avoiding excessive contact with the filament that would interfere with light distribution

Inventive Principle:
Principle #35Parameter changes

3Productivity

If the lamp is designed for maximum heating power, then processing efficiency increases, but the filament becomes more susceptible to sagging and failure

Engineering Contradiction:
Improveepitaxial processing efficiencyVSAvoidlamp lifespan
Core Design Contradiction:
ProductivityVSDuration of action of stationary object

Solution Approach 1:

The patent implements beforehand cushioning by designing an enhanced J-hook filament support structure with extended second vertical portions before the lamp undergoes high-power operation. This pre-engineered support structure provides necessary mechanical reinforcement to counteract the sagging forces that occur during high-power heating, thereby extending lamp lifespan while maintaining processing efficiency

Inventive Principle:
Principle #11Beforehand cushioning (Prior cushioning)

Solution Approach 2:

The patent modifies the geometric parameters of the filament support, specifically extending the second vertical portion to 60%-100% of the first vertical portion's length. This parameter change strengthens the support structure to withstand the thermal and mechanical stresses of high-power operation, preventing premature filament failure while maintaining productivity

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration significantly reduces premature failures by enhancing filament support and extending the lamp's lifespan, while ensuring efficient heating and light distribution in the epitaxial processing chamber.

Implementation Method 1

Tungsten filaments radiate infrared radiation at temperatures up to about 3400 degrees Celsius

Methodology Applied
Scientific EffectInfrared radiation: Infrared Radiation

Implementation Method 2

the filament 120 to radiate light and heat

Methodology Applied
Scientific EffectThermal radiation: Thermal Radiation

Implementation Method 3

the tungsten in the filament 120 is excited and evaporates

Methodology Applied
Scientific EffectEvaporation: Evaporation

Implementation Method 4

The evaporated tungsten reacts and combines with the halogen gas to create a tungsten-halogen molecule

Methodology Applied
Scientific EffectChemical reaction: Chemical Bonding

Implementation Method 5

As the tungsten-halogen molecule moves away from the filament, the temperature decreases, causing the bulb 112 to push the tungsten-halogen molecule back towards the filament 120

Methodology Applied
Scientific EffectTemperature gradient: Temperature Gradient

Data Source

PatentUS11881392B2High power tungsten halogen lamp lifetime improvement through J-hook design
Publication Date: 2024.01.23 APPLIED MATERIALS INC
  • US11881392B2 patent drawing
  • US11881392B2 patent drawing
  • US11881392B2 patent drawing

AI summary

A lamp and epitaxial processing apparatus are described herein. In one example, the lamp includes a bulb, a filament, and a plurality of filament supports disposed in spaced-apart relation to the filament, each of the filament supports having a hook support and a hook. The hook includes a connector configured to fasten the hook to the hook support, a first vertical portion extending from the connector toward the filament, and a rounded portion extending from an end of the first vertical portion distal from the connector and configured to wrap around the filament. A second vertical portion extends from an end of the rounded portion distal from the first vertical portion and the second vertical portion has a length between 60% and 100% of the length of the first vertical portion.