Halogen-Based Rubber Composition for Corrosion-Resistant Semiconductor Seals
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Solution Overview
Problem
Existing rubber members used in semiconductor manufacturing are susceptible to corrosion and metal elution when exposed to corrosive substances, which compromises their durability and performance.
Innovation Solution
A rubber member composed of halogen-based rubber, such as chlorosulfonated ethylene rubber or chlorinated polyethylene rubber, optionally containing an acid acceptor like lead oxide or epoxidized polybutadiene, is formulated with specific crosslinking agents and additives to enhance corrosion resistance and reduce metal elution.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional rubber members are used in semiconductor manufacturing, then they provide basic sealing and structural functions, but they suffer from corrosion and metal elution when exposed to corrosive substances
Solution Approach 1:
The patent changes the chemical composition parameters of the rubber member by incorporating halogen-based rubber (containing chlorine, bromine, or iodine) and acid acceptors (such as lead compounds or epoxy compounds) in specific proportions. This compositional parameter change enables the rubber to resist corrosion from acidic and basic substances while minimizing metal elution, directly resolving the contradiction between reliability and harmful factors.
Solution Approach 2:
The patent creates a composite rubber material by combining halogen-based rubber with acid acceptors and crosslinking agents. This composite structure synergistically enhances corrosion resistance (improving reliability) while the acid acceptor components neutralize corrosive substances, reducing metal elution (reducing harmful factors).
2Reliability
If halogen-based rubber with acid acceptors is used to improve corrosion resistance, then reliability increases, but the complexity of material formulation and processing increases
Solution Approach 1:
The patent specifies precise parameter ranges for the rubber composition: halogen-based rubber (10-50 parts by mass), acid acceptor (1-35 parts by mass based on halogen-based rubber), and crosslinking agent amounts. These controlled parameter changes achieve optimal corrosion resistance while managing formulation complexity through quantified specifications.
Solution Approach 2:
The patent applies different functional components to different aspects of the rubber's performance: halogen-based rubber provides base corrosion resistance, acid acceptors specifically target acidic and basic substance neutralization, and crosslinking agents enhance structural integrity. This localized functional assignment improves overall reliability while organizing the material complexity into distinct functional zones.
3Strength
If crosslinking agents are added to enhance structural integrity, then strength increases, but the risk of metal elution from crosslinking components increases
Solution Approach 1:
The patent introduces acid acceptors (lead compounds or epoxy compounds) as intermediary substances that neutralize corrosive substances before they can attack the crosslinked structure. This intermediary layer protects the crosslinking network from corrosion, maintaining structural integrity while preventing metal elution from the crosslinking agents.
Solution Approach 2:
The patent converts the potential harm of crosslinking agents (which could leach metals in corrosive environments) into a benefit by using acid acceptors to neutralize the corrosive substances. The crosslinking structure that would normally be vulnerable to corrosion becomes protected, and the metal elution issue is transformed into a controlled neutralization process.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The rubber member exhibits excellent corrosion resistance and minimal metal elution, maintaining integrity when immersed in various corrosive chemicals, ensuring durability in semiconductor manufacturing environments.
Implementation Method 1
a rubber member containing a halogen-based rubber containing at least one selected from the group consisting of chlorine, bromine, and iodine... the rubber member comes into contact with a corrosive substance
Implementation Method 2
the rubber member contains at least one acid acceptor selected from the group consisting of a lead compound and an epoxy compound
Implementation Method 3
the halogen-based rubber is crosslinked using at least one of a peroxide crosslinking agent or a sulfur-based crosslinking agent
Data Source
AI summary
The disclosure provides a rubber member excellent in corrosion resistance and a semiconductor manufacturing-related apparatus using the rubber member. Provided is a rubber member containing a halogen-based rubber containing at least one selected from the group consisting of chlorine, bromine, and iodine. The rubber member includes at least one selected from the group consisting of an architectural finishing material member, a mobility member, an aerospace member, a semiconductor member, and an information and communication member. The rubber member comes into contact with a corrosive substance.