Handling Unit Coupling Transport Container Cover as End Effector

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Solution Overview

Problem

Existing substrate handling units in clean room systems require complex configurations and additional components to manage substrate transfer efficiently, leading to increased costs and contamination risks due to separate end effectors and conversion processes.

Innovation Solution

The cover part of the transport container is integrated as an end effector with the handling unit, forming a rigid connection and using a vacuum connection to reduce load and prevent contamination, allowing the carrying insert to function as a component of the handling unit, eliminating the need for a separate end effector and simplifying the structure while maintaining atmospheric control.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If a separate end effector is provided for the carrying insert, then the carrying insert can be transferred, but the device complexity increases and additional conversion processes are required

Engineering Contradiction:
Improvesubstrate transfer processVSAvoidend effector configuration
Core Design Contradiction:
Ease of operationVSDevice complexity

Solution Approach 1:

The patent merges the end effector functionality directly into the handling unit by providing a coupling element on the handling unit that directly couples to the carrying insert. This eliminates the need for a separate, dedicated end effector for the carrying insert, thereby reducing device complexity while maintaining the ability to transfer substrates efficiently.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The handling unit is designed with a universal coupling element that can interface with different carrying inserts and substrate holders. This multi-functional design allows the same handling unit to perform substrate transfer operations without requiring specialized end effectors for each type of carrier, reducing overall system complexity.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Reliability

If the cover part is designed to close the transport container, then atmospheric control is improved, but the load on the cover part increases requiring additional stiffening

Engineering Contradiction:
Improveatmospheric controlVSAvoidcover part stiffness
Core Design Contradiction:
ReliabilityVSStrength

Solution Approach 1:

The coupling element serves dual functions: it mechanically connects the cover part to the handling unit for atmospheric control, and simultaneously provides structural stiffening to reinforce the cover part against loading. This merged design eliminates the need for separate stiffening components.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The coupling element is designed as a rigid structural component that combines mechanical coupling and stiffening functions. The rigid design of the coupling element provides the necessary structural reinforcement to the cover part while maintaining atmospheric sealing.

Inventive Principle:
Principle #40Composite materials

3Strength

If mechanical connection is used between cover part and handling unit, then rigid connection is achieved, but contamination risks increase in clean room conditions

Engineering Contradiction:
Improveconnection rigidityVSAvoidcontamination risk
Core Design Contradiction:
StrengthVSObject-affected harmful factors

Solution Approach 1:

The patent employs a vacuum connection system where the coupling element can establish a vacuum seal with the cover part. This pneumatic connection method provides rigid coupling for atmospheric control while minimizing mechanical contact points that could generate contamination, making it suitable for clean room environments.

Inventive Principle:
Principle #29Pneumatics and hydraulics

Solution Approach 2:

The vacuum connection replaces traditional mechanical fastening systems (screws, clips, etc.) with a pneumatic seal-based connection. This substitution reduces the number of mechanical contact points and potential contamination sources while maintaining the necessary connection rigidity for atmospheric control.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

4Adaptability or versatility

If multiple transfer steps are used from transport container to substrate receptacle, then flexibility is improved, but productivity decreases and contamination risk increases

Engineering Contradiction:
Improvetransfer flexibilityVSAvoidsubstrate transfer efficiency
Core Design Contradiction:
Adaptability or versatilityVSProductivity

Solution Approach 1:

The handling unit is designed to directly couple with both the carrying insert in the transport container and the substrate holder. This merged configuration enables a single-step transfer operation, eliminating intermediate transfer steps and conversion processes, thereby improving productivity while maintaining flexibility.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The coupling element acts as an intermediary that directly connects the handling unit to the carrying insert, enabling direct substrate transfer from the transport container to the substrate holder. This intermediary mechanism eliminates the need for multiple transfer steps and intermediate carriers.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design simplifies the substrate transfer process, reduces contamination risks, and allows for efficient use in various atmospheric conditions by integrating the carrying insert with the handling unit, enabling direct access to substrate receptacles and reducing the need for intermediate transfer steps, thus enhancing operational efficiency and cost-effectiveness.

Implementation Method 1

The corresponding connection of the cover part to the handling part can be designed not only mechanically, but also advantageously as a vacuum connection, so that additional loads on the working space due to contamination of the cover part are avoided.

Methodology Applied
Scientific EffectVacuum connection: Vacuum

Implementation Method 2

If the transport container is under negative pressure, the corresponding pressure difference can also be used to secure the cover part that closes the transport container

Methodology Applied
Scientific EffectPressure difference: Pressure Gradient

Data Source

PatentEP3312873B1Device for transferring substrates
Publication Date: 2021.02.24 ASYS AUTOMATIC SYST
  • EP3312873B1 patent drawingFigure 1~2
  • EP3312873B1 patent drawingFigure 3~4
  • EP3312873B1 patent drawingFigure 5

AI summary

A separate carrying insert (7) for a transport container (4) becomes, by accessing and coupling to a handling unit (6), a component of a multi-segment arm of its handling unit (6) and forms the end effector (14) of this handling unit (6).