Hard Coating Layer Oblique Vertical TiN TiAlN Structure

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Solution Overview

Problem

Existing methods for forming hard coating layers face challenges in controlling variables during the coating process, leading to enhanced hardness but brittle coatings that are easily broken.

Innovation Solution

A method involving the formation of oblique and vertical titanium-nitride (TiN) coating layers on a substrate, with oblique layers formed at angles between 10° and 80°, and vertical layers applied after bias-voltage, in multiple layers with alternating directions, using ultrasonic washing and vacuum deposition techniques to enhance mechanical properties.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Strength

If conventional hard coating methods are used to enhance hardness, then the hardness of the coating layer is improved, but the coating layer becomes brittle and easily broken

Engineering Contradiction:
ImprovehardnessVSAvoidbrittleness
Core Design Contradiction:
StrengthVSReliability

Solution Approach 1:

The invention uses composite coating structure combining TiN and TiAlN layers with different compositions and properties. The TiN layer provides high hardness while the TiAlN layer provides ductility and toughness, creating a composite material system that achieves both high hardness and reduced brittleness through material composition design

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The coating layer is segmented into multiple sub-layers with different thicknesses and compositions (TiN and TiAlN alternating layers). This segmentation allows each layer to contribute different properties to the overall coating, with thinner layers providing hardness and thicker layers providing toughness, thereby resolving the contradiction between hardness and brittleness

Inventive Principle:
Principle #1Segmentation

2Strength

If nano-sized crystal structure or multi-layered coatings are formed to improve mechanical properties, then hardness is enhanced, but the coating process becomes complex and difficult to control

Engineering Contradiction:
ImprovehardnessVSAvoidcoating process complexity
Core Design Contradiction:
StrengthVSDevice complexity

Solution Approach 1:

The invention controls coating parameters such as deposition angle (45° oblique), bias voltage (50-150V), and layer thickness ratios to achieve desired microstructure and properties. By systematically varying these parameters during sequential deposition, the process achieves complex multi-layered structures with controlled nano-crystalline features while maintaining process controllability through parameter optimization

Inventive Principle:
Principle #35Parameter changes

3Strength

If oblique coating is performed first followed by vertical coating with bias-voltage, then the coating layer achieves high hardness exceeding 30 GPa, but the process requires multiple sequential steps

Engineering Contradiction:
ImprovehardnessVSAvoidcoating process efficiency
Core Design Contradiction:
StrengthVSProductivity

Solution Approach 1:

The coating process uses periodic alternating deposition of TiN and TiAlN layers in a cyclic manner. Each cycle consists of depositing a thin TiN layer followed by a TiAlN layer, repeated multiple times to build up the composite structure. This periodic action enables systematic control of coating properties while achieving high hardness through cumulative layering effects

Inventive Principle:
Principle #19Periodic action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The method significantly improves the hardness of the coating layer beyond conventional limits, with repeated oblique and vertical layer formation achieving hardness exceeding 30 GPa, while reducing brittleness and enhancing Young's Modulus.

Implementation Method 1

installing the washed substrate in a vacuum equipment, and evacuating the chamber of the vacuum equipment

Methodology Applied
Scientific EffectVacuum: Vacuum

Implementation Method 2

forming a vertical coating layer, vertically to the substrate, on the oblique coating layer by applying bias-voltage to the substrate

Methodology Applied
Scientific EffectElectric Field: Electric Field

Implementation Method 3

the substrate is washed by ultra-sonic wave with alcohol and acetone

Methodology Applied
Scientific EffectUltrasonic Vibration: Ultrasonic Vibration

Implementation Method 4

forming an oblique coating layer on the substrate, and forming a vertical coating layer

Methodology Applied
Scientific EffectPhysical Vapour Deposition: Physical Vapour Deposition

Data Source

PatentEP2610364B1Hard coating layer and method for forming the same
Publication Date: 2021.07.21 RES INST OF IND SCI & TECH
  • EP2610364B1 patent drawingFigure 1
  • EP2610364B1 patent drawingFigure 2
  • EP2610364B1 patent drawingFigure 3

AI summary

The present invention relates to hard coating layer and a method for forming the hard coating layer. A method for forming hard coating layer which comprises: washing a substrate; installing the washed substrate in a vacuum equipment, and vacuating the chamber of the vacuum equipment; cleaning the substrate; forming oblique coating layer on the substrate; and forming vertical coating layer, vertically to the substrate, on the oblique coating layer by applying bias-voltage after forming oblique coating layer is provided. According to present invention, hardness of coating layer may be enhanced by forming a oblique coating layer and vertical coating layer on a substrate.