High-Order Harmonic Generation for Attosecond Electric Field Probing

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Solution Overview

Problem

Current methods are inadequate for generating and measuring ultra-short probe signals in the ultraviolet regime for dynamic and high-resolution probing of internal electric fields in semiconductor devices, as they are limited by the duration of standard laser pulses and lack efficient techniques for spectral up-conversion from infrared to ultraviolet ranges.

Innovation Solution

The method involves generating high-order harmonics in semiconductor or dielectric media using a semiconductor-laser interaction region, where a driving laser field interacts with the medium to produce high-order harmonics, which are then directed and measured to construct a high-resolution dynamic profile of internal electric fields, utilizing a mid-infrared laser pulse and a secondary control field to modulate the harmonic response.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If standard laser pulses are used for probing, then the setup is simple and easy to operate, but the temporal resolution is insufficient for dynamic phenomena

Engineering Contradiction:
Improvetemporal resolutionVSAvoidsystem complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent changes the fundamental parameter of laser pulse duration by generating high-order harmonics that produce attosecond-scale pulses (sub-femtosecond duration). This is achieved by taking a conventional femtosecond laser pulse and generating harmonics that are 100-1000 times shorter in duration, thereby achieving the required temporal resolution for dynamic phenomena in semiconductor devices.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent uses periodic laser pulses with specific durations and frequencies to generate high-order harmonics. The periodic nature of the laser pulses enables the generation of coherent harmonic radiation that can be used as ultra-short probe signals. The periodic action is controlled through the laser driver frequency and the nonlinear interaction in the semiconductor material.

Inventive Principle:
Principle #19Periodic action

2Illumination intensity

If infrared laser pulses are used, then the generation process is efficient, but the spectral range is insufficient for ultraviolet regime probing

Engineering Contradiction:
Improvespectral energyVSAvoidspectral conversion complexity
Core Design Contradiction:
Illumination intensityVSDevice complexity

Solution Approach 1:

The patent transitions from infrared to ultraviolet spectral ranges by generating high-order harmonics. This dimensional change in frequency space is achieved through the nonlinear optical process where the fundamental infrared frequency (ω) is multiplied to produce harmonics at frequencies n×ω, where n can be 10-100 or higher, thereby reaching the ultraviolet regime from the infrared pump source.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent changes the frequency parameter of the laser radiation through harmonic generation. By adjusting the order of the harmonic (n) and the fundamental frequency (ω), the system can tune the output spectral range from infrared to ultraviolet. This parameter change enables the same physical setup to operate across different spectral regimes without requiring separate laser sources.

Inventive Principle:
Principle #35Parameter changes

3Measurement precision

If longer probe pulses are used, then the measurement system is simpler, but the resolution of dynamic electric fields is degraded

Engineering Contradiction:
Improvefield resolutionVSAvoidpulse duration
Core Design Contradiction:
Measurement precisionVSDuration of action of moving object

Solution Approach 1:

The patent employs periodic laser pulses with carefully controlled durations to achieve the desired balance between resolution and signal strength. The periodic nature allows for coherent accumulation of harmonic signals while maintaining ultra-short duration. The pulse duration is controlled through the driver laser parameters and the nonlinear interaction length, enabling optimization of both resolution and measurement capability.

Inventive Principle:
Principle #19Periodic action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables the generation and measurement of high-order harmonics, allowing for high-resolution dynamic imaging of internal electric fields in semiconductor devices, overcoming the limitations of standard laser pulse durations and achieving attosecond-scale temporal resolution.

Implementation Method 1

generating one or more high-order harmonics in a semiconductor or dielectric medium, directing the one or more high-order harmonics towards one or more semiconductor devices

Methodology Applied
Scientific EffectHigh-order harmonic generation: Second Harmonic Generation

Implementation Method 2

facilitate an interaction of one or more high-order harmonics with one or more internal electric fields of the one or more semiconductor devices

Methodology Applied
Scientific EffectElectric field interaction: Electric Field

Data Source

PatentUS10107846B2Apparatus and method for strong-field probing of electric fields in solid-state electronic circuits
Publication Date: 2018.10.23 UNIVERSITY OF OTTAWA
  • US10107846B2 patent drawing
  • US10107846B2 patent drawing
  • US10107846B2 patent drawing

AI summary

A method and apparatus for generating high-order harmonics in a solid-state medium comprising integrated semiconductor devices and electronics. The high-order harmonics interact with and are modified by the internal electric field associated with the operation of the integrated semiconductor devices and electronics. Measurement of the high-order harmonics after modification by the internal electric fields amounts to high resolution (temporal and spatial) dynamic imaging of the internal electric fields associated with the integrated semiconductor devices and electronics.