Heterojunction Bipolar Transistor Emitter Offset for Thermal Stress Relief

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Solution Overview

Problem

In semiconductor devices with heterojunction bipolar transistors, thermal stress due to differences in thermal expansion coefficients between the emitter layer and the pillar bump leads to a rapid degradation of current gain, especially at high temperatures, reducing the long-term reliability when mounted face-down on a substrate.

Innovation Solution

The semiconductor device design includes a heterojunction bipolar transistor with an emitter wiring line covered by an insulating film, featuring an opening that is positioned to reduce the overlapping area with the emitter layer, allowing the bump to be offset from the emitter layer's center, thereby relieving thermal stress while maintaining low thermal resistance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If the pillar bump is disposed directly above the emitter layer to reduce thermal resistance, then heat dissipation is improved, but thermal stress increases due to difference in thermal expansion coefficients between the emitter layer and the pillar bump

Engineering Contradiction:
Improvethermal resistanceVSAvoidcurrent gain degradation
Core Design Contradiction:
TemperatureVSReliability

Solution Approach 1:

The opening is positioned asymmetrically with respect to the emitter layer, specifically shifted toward one end of the emitter layer rather than being centered. This asymmetric positioning causes the bump to be offset from the center of the emitter layer, creating a deliberate misalignment that reduces thermal stress while maintaining effective heat dissipation path.

Inventive Principle:
Principle #4Asymmetry

Solution Approach 2:

The insulating film has a localized opening at a specific position rather than being uniformly distributed. This local modification allows the bump to contact the emitter layer at an optimized location that balances thermal conduction efficiency with stress reduction, creating different functional zones within the same structure.

Inventive Principle:
Principle #3Local quality

2Reliability

If the opening is positioned to reduce overlapping area with the emitter layer, then thermal stress is reduced, but thermal resistance may increase

Engineering Contradiction:
Improvethermal stressVSAvoidthermal resistance
Core Design Contradiction:
ReliabilityVSTemperature

Solution Approach 1:

The opening is positioned to provide partial overlap with the emitter layer rather than complete coverage or no overlap. This partial positioning achieves a compromise where enough overlap exists to maintain low thermal resistance while sufficient offset exists to reduce thermal stress, avoiding the extremes of both full alignment and complete separation.

Inventive Principle:
Principle #16Partial or excessive action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design effectively reduces thermal stress and maintains low thermal resistance, preventing rapid degradation of current gain and improving the long-term reliability of the semiconductor device even at high temperatures.

Implementation Method 1

thermal stress due to differences in thermal expansion coefficients between the emitter layer and the pillar bump

Methodology Applied
Scientific EffectThermal stress: Thermal Expansion

Data Source

PatentUS11532736B2Semiconductor device
Publication Date: 2022.12.20 MURATA MFG CO LTD
  • US11532736B2 patent drawing
  • US11532736B2 patent drawing
  • US11532736B2 patent drawing

AI summary

A semiconductor device that includes a bipolar transistor, wherein a third opening, through which a pillar bump and a second wiring line, which is electrically connected to an emitter layer, contact each other, is shifted in a longitudinal direction of the emitter layer away from a position at which the third opening would be directly above the emitter layer. The third opening is arranged, with respect to the emitter layer, such that an end portion of the emitter layer in the longitudinal direction of the emitter layer and the edge of the opening of the third opening are substantially aligned with each other.