HC-PCF Fiber Assembly for Broadband Source Lifetime Extension

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Solution Overview

Problem

Existing broadband radiation sources for metrology applications in integrated circuit manufacturing are limited by performance degradation and short lifetime issues, particularly in hollow core photonic crystal fibers (HC-PCFs), due to contamination, overheating, and hydrogen-induced surface reduction.

Innovation Solution

A fiber assembly comprising multiple hollow core photonic crystal fibers (HC-PCFs) arranged in a manner that allows for automatic and quick replacement of individual fibers, optimizing spectral characteristics and minimizing interaction with cladding structures to extend lifetime and improve performance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If hollow core photonic crystal fibers are used for broadband radiation generation, then spectral characteristics are improved, but lifetime is reduced due to contamination, overheating, and hydrogen-induced surface reduction

Engineering Contradiction:

Improvespectral characteristicsVSAvoidlifetime

Core Design Contradiction:

Measurement precisionVSDuration of action of stationary object

Solution Approach 1:

The fiber assembly is divided into multiple individual hollow core photonic crystal fibers that can be independently replaced. When one fiber degrades due to contamination, overheating, or hydrogen-induced surface reduction, only that specific fiber needs to be replaced rather than the entire assembly, thereby extending the operational lifetime while maintaining spectral characteristics.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The patent modifies the physical and chemical parameters of the fiber environment by implementing a gas flow system that controls the atmosphere around the fiber tips. This prevents contamination and hydrogen-induced surface reduction by maintaining a controlled environment, thereby extending fiber lifetime while preserving spectral output quality.

Inventive Principle:

Principle #35Parameter changes

2Reliability

If multiple hollow core photonic crystal fibers are assembled together, then reliability is improved through redundancy, but device complexity increases

Engineering Contradiction:

ImprovereliabilityVSAvoiddevice complexity

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The fiber assembly is designed with universal mounting structures and standardized interfaces that allow individual fibers to be easily installed and replaced. The gas flow system and fiber holders serve multiple functions including mechanical support, thermal management, and contamination prevention, thereby managing device complexity while maintaining reliability through redundancy.

Inventive Principle:

Principle #6Universality (Multi-functionality)

3Ease of repair

If fiber assembly allows quick replacement of individual fibers, then ease of repair is improved, but manufacturing precision requirements increase

Engineering Contradiction:

Improveease of repairVSAvoidmanufacturing precision

Core Design Contradiction:

Ease of repairVSManufacturing precision

Solution Approach 1:

The fiber assembly is pre-configured with mounting structures, alignment features, and gas flow channels that facilitate quick fiber replacement. The standardized interfaces and pre-installed holders reduce the complexity of the replacement process, allowing easy repair while maintaining manufacturing precision through design-level solutions rather than requiring high precision during the replacement operation itself.

Inventive Principle:

Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enables extended lifetime and improved performance of broadband radiation sources by reducing overheating and contamination risks, allowing for flexible spectral tuning and minimizing manufacturing costs associated with precise fiber fabrication.

Implementation Method 1

a first end section of the optical fiber configured to receive input radiation from a pump source; a second end section for outputting broadband output radiation

Methodology Applied

Scientific EffectPhotonic crystal fiber guidance: Photonic Crystal

Implementation Method 2

The hollow core of the optical fiber is filled with a gas acting as a broadening medium for broadening input radiation

Methodology Applied

Scientific EffectGas medium interaction:

Implementation Method 3

The hollow core of the optical fiber is filled with a gas acting as a broadening medium for broadening input radiation

Methodology Applied

Scientific EffectSpectral broadening:

Data Source

PatentUS12237639B2Hollow-core photonic crystal fiber based broadband radiation generator

Publication Date: 2025.02.25 ASML NETHERLANDS BV

AI summary

A broadband radiation source device, including a fiber assembly having a plurality of optical fibers, each optical fiber being filled with a gas medium, wherein the broadband radiation source device is operable such that subsets of the optical fibers are independently selectable for receiving a beam of input radiation so as to generate a broadband output from only a subset of the plurality of optical fibers at any one time.