HC-PCF Structural Variation for Broadband UV Radiation Generation
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Solution Overview
Problem
Existing metrology tools in IC manufacturing require improved broadband radiation sources for accurate and robust measurements, particularly in the ultraviolet region, to overcome challenges in reproducing small features and ensuring precise pattern transfer in lithographic processes.
Innovation Solution
A hollow-core photonic crystal fiber (HC-PCF) is designed with structurally varied portions to generate broadband output radiation, including wavelengths in the ultraviolet region through a modulation instability dominated nonlinear optical process, optimizing the location of these variations to enhance spectral expansion.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a hollow-core photonic crystal fiber is used to generate broadband radiation, then the spectral bandwidth is improved, but the device complexity increases due to the need for structurally varied portions and precise positioning
Solution Approach 1:
The patent applies local quality by introducing structurally varied portions at specific locations along the HC-PCF rather than making the entire fiber structurally complex. The first structurally varied portion is positioned downstream of where pump radiation is spectrally expanded by modulation instability, and the second structurally varied portion is positioned further downstream for additional spectral expansion. This localized structural variation achieves broadband UV generation while minimizing overall device complexity.
2Manufacturing precision
If the HC-PCF is designed with multiple structurally varied portions for broadband generation, then the ultraviolet wavelength coverage is improved, but the manufacturing precision requirements increase
Solution Approach 1:
The patent applies preliminary action by pre-calculating and pre-positioning the structurally varied portions at specific locations along the HC-PCF based on expected pump radiation spectral expansion points. The first structurally varied portion is positioned downstream of where modulation instability dominated nonlinear optical process expands the pump radiation spectrum, and the second structurally varied portion is positioned further downstream. This pre-positioning approach enables precise UV wavelength coverage while managing manufacturing precision requirements through design-stage optimization.
3Adaptability or versatility
If pump radiation is spectrally expanded by modulation instability dominated nonlinear optical process, then the broadband radiation generation is improved, but the energy loss increases due to nonlinear optical processes
Solution Approach 1:
The patent applies parameter changes by utilizing modulation instability dominated nonlinear optical processes to transform pump radiation parameters (wavelength, spectral distribution) into broadband radiation parameters. The structurally varied portions are specifically designed to enable this parameter transformation, with the first structurally varied portion positioned where pump radiation spectral expansion begins and the second structurally varied portion positioned further downstream for additional expansion. This parameter transformation approach achieves broadband UV generation while managing energy loss through optimized structural design.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The HC-PCF effectively generates broadband radiation with extended ultraviolet wavelengths, improving the accuracy and robustness of metrology tools for IC manufacturing, enabling precise pattern transfer and measurement.
Implementation Method 1
a hollow-core photonic crystal fiber (HC-PCF) comprising at least one structurally varied portion having at least one structural parameter of the HC-PCF varied with respect to one or more main portions of the HC-PCF, wherein the at least one structurally varied portion comprises at least a first structurally varied portion located downstream of a position along the length of the HC-PCF where the pump radiation will be spectrally expanded by a modulation instability dominated nonlinear optical process
Data Source
AI summary
A broadband radiation source device configured for generating a broadband output radiation upon receiving pump radiation, the device including: a hollow-core photonic crystal fiber (HC-PCF) including at least one structurally varied portion having at least one structural parameter of the HC-PCF varied with respect to one or more main portions of the HC-PCF, wherein the at least one structurally varied portion includes at least a structurally varied portion located downstream of a position along the length of the HC-PCF where the pump radiation will be spectrally expanded by a modulation instability dominated nonlinear optical process, and wherein the at least one structurally varied portion is configured and located such that the broadband output radiation includes wavelengths in the ultraviolet region.