Hydrogen Chloride Nozzle Design for Trichlorosilane Production

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Conventional hydrogen chloride gas ejecting nozzles in trichlorosilane production apparatuses are prone to clogging due to small grain size metal silicon powder, making them difficult to maintain and reducing production efficiency.

Innovation Solution

A hydrogen chloride gas ejecting nozzle with a shaft portion and a head portion, featuring a supply hole and multiple ejection holes that extend radially from the head portion, preventing clogging and allowing for wide dispersion of hydrogen chloride gas, and designed for easy attachment, detachment, and maintenance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If conventional hydrogen chloride gas ejecting nozzles are used with small grain size metal silicon powder, then the powder can be fluidized and reacted, but the nozzles are prone to clogging and difficult to maintain

Engineering Contradiction:
Improvetrichlorosilane production efficiencyVSAvoidnozzle maintenance difficulty
Core Design Contradiction:
ProductivityVSEase of repair

Solution Approach 1:

The nozzle is designed with a detachable structure that allows it to be easily removed and installed. The nozzle body can be separated from the support plate, enabling simple maintenance operations without disassembling the entire reactor. This dynamic design resolves the contradiction by making the nozzle maintainable while preserving its fluidization function.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The nozzle system is divided into separate components: the nozzle body, the support plate with through-holes, and the connecting structure. This segmentation allows the nozzle to be independently removed for cleaning or replacement, solving the maintenance difficulty while maintaining the fluidization capability during operation.

Inventive Principle:
Principle #1Segmentation

2Speed

If hydrogen chloride gas is ejected at high speed through conventional nozzles, then metal silicon powder is fluidized for reaction, but the nozzles clog due to small grain size powder

Engineering Contradiction:
Improvegas ejection speedVSAvoidnozzle clogging resistance
Core Design Contradiction:
SpeedVSReliability

Solution Approach 1:

The nozzle structure incorporates both vertical ejection (through the nozzle holes) and horizontal flow components (through the support plate through-holes). This multi-dimensional gas flow path prevents powder accumulation and clogging while maintaining high ejection speed for effective fluidization.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The support plate with through-holes acts as an intermediary structure between the nozzle body and the reactor bottom. It provides alternative flow paths that prevent direct clogging of the nozzle holes while maintaining the high-speed gas ejection necessary for powder fluidization.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Reliability

If the nozzle is fixed to the bottom portion of the apparatus main body, then stable gas ejection is achieved, but the nozzle cannot be easily removed for maintenance

Engineering Contradiction:
Improvegas ejection stabilityVSAvoidnozzle removal ease
Core Design Contradiction:
ReliabilityVSEase of operation

Solution Approach 1:

The connection between the nozzle and support plate is designed to be detachable rather than permanently fixed. This dynamic connection allows the nozzle to be easily removed for maintenance while maintaining stable gas ejection during operation, resolving the contradiction between stability and ease of removal.

Inventive Principle:
Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The nozzle design prevents clogging, ensures stable operation, and enhances trichlorosilane production efficiency by effectively dispersing hydrogen chloride gas, facilitating easy maintenance and cost-effective production.

Implementation Method 1

hydrogen chloride gas is ejected at a high speed through a hydrogen chrolide gas ejecting nozzle

Methodology Applied
Scientific EffectGas ejection: Jet

Implementation Method 2

metal silicon powder is fluidized

Methodology Applied
Scientific EffectFluidization: Fluidisation

Implementation Method 3

hydrogen chloride gas is widely dispersing into metal silicon powder

Methodology Applied
Scientific EffectGas dispersion: Dispersion (of waves)

Data Source

PatentUS8974760B2Hydrogen chloride gas ejecting nozzle, reaction apparatus for producing trichlorosilane and method for producing trichlorosilane
Publication Date: 2015.03.10 HIGH-PURITY SILICON CORP
  • US8974760B2 patent drawing
  • US8974760B2 patent drawing
  • US8974760B2 patent drawing

AI summary

There is provided a hydrogen chrolide gas ejecting nozzle 1 used in a reaction apparatus for producing trichlorosilane in which metal silicon powder is reacted with hydrogen chloride gas to generate trichlorosilane. The member is provided with a shaft portion extending in the longitudinal direction and a head portion that is provided on an end of the shaft portion and extends in a direction intersecting the longitudinal direction of the shaft portion. A supply hole extending in the longitudinal direction is formed in the shaft portion, a plurality of ejection holes are formed in the head portion, and each of the ejection holes is communicatively connected to the supply hole and opened on the outer surface of the head portion toward a direction intersecting the direction to which the supply hole extends.