Multi-Anion HEA Oxy-Nitride Coatings via PVD

Solution Overview

Problem

Existing methods for producing High Entropy Alloy (HEA) coatings lack efficiency, simplicity, and cost-effectiveness while providing thermal stability at high temperatures, often requiring additional equipment and steps that increase costs and limit applicability.

Innovation Solution

A method using Physical Vapor Deposition (PVD) techniques to produce multi-anion HEA oxy-nitride coatings with a cation sublattice of five elements and an anion sublattice of oxygen and nitrogen, which are thermally stable at temperatures above 700°C, achieved through cathodic arc evaporation or sputtering without additional thermal post-treatment.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Stability of the object's composition

If additional thermal post-treatment steps are used to achieve thermal stability, then thermal stability is improved, but device complexity and manufacturing cost increase

Engineering Contradiction:
Core Design Contradiction:
Stability of the object's compositionVSDevice complexity

Solution Approach 1:

The coating is designed with preliminary compositional optimization during the PVD deposition process, incorporating specific multi-principal element combinations (Al, Cr, Mn, Ti, V, Mo, Hf, Ta, Nb, W) that inherently provide thermal stability without requiring subsequent thermal treatment steps. The coating composition is pre-configured to maintain phase stability up to 1100°C through controlled element ratios and multi-anion (nitride/oxide) structure.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The coating material itself provides the thermal stability function through its intrinsic multi-principal element composition and multi-anion structure, eliminating the need for external thermal post-treatment processes. The material's own configurational entropy and bonding characteristics enable it to self-maintain its cubic phase structure at elevated temperatures without additional energy input or processing steps.

Inventive Principle:
Principle #25Self-service

2Stability of the object's composition

If additional equipment such as laser sources is introduced for thermal post-treatment, then thermal stability is improved, but manufacturing cost and device complexity increase

Engineering Contradiction:
Core Design Contradiction:
Stability of the object's compositionVSEase of manufacture

Solution Approach 1:

The thermal post-treatment step and associated equipment (laser sources, additional heating apparatus) are completely removed from the manufacturing process. The invention extracts unnecessary processing steps by designing a coating composition that achieves phase stability through its inherent multi-principal element and multi-anion structure, deposited directly in the desired cubic phase via PVD without subsequent thermal modification.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The invention replaces expensive, complex thermal post-treatment equipment with a simplified PVD deposition process using standard multi-target or co-sputtering apparatus. The coating achieves its functional properties through compositional design rather than expensive post-processing equipment, making the manufacturing process more accessible and cost-effective.

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

3Productivity

If multi-anion HEA oxy-nitrides are produced without additional thermal treatment, then manufacturing efficiency is improved, but achieving high thermal stability becomes more difficult

Engineering Contradiction:
Core Design Contradiction:
ProductivityVSStability of the object's composition

Solution Approach 1:

The invention changes the compositional parameters by incorporating multi-principal elements (at least 5 different metal elements) and multi-anion (nitride and oxide) combinations with specific atomic ratios. This compositional parameter optimization enables the coating to achieve thermal stability at 1100°C through the deposition process itself, without requiring subsequent thermal treatment, thus maintaining high manufacturing efficiency.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The coating is designed as a composite multi-principal element alloy (Mn+1)An+2Bn-2C structure combining multiple metal elements (Al, Cr, Mn, Ti, V, Mo, Hf, Ta, Nb, W) with multi-anion (nitride/oxide) bonding. This composite structure leverages the synergistic effects of different elements and anion types to achieve high thermal stability and mechanical properties directly during PVD deposition, eliminating the need for additional thermal processing.

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The method enables the production of coatings with enhanced thermal stability and mechanical properties, such as high oxidation resistance and fracture resistance, maintaining a single cubic phase up to 1100°C without undesirable phase changes, suitable for wear-resistant and decorative applications.

Implementation Method 1

A method using Physical Vapor Deposition (PVD) techniques to produce multi-anion HEA oxy-nitride coatings

Methodology Applied
Scientific EffectPhysical Vapour Deposition: Physical Vapour Deposition

Implementation Method 2

achieved through cathodic arc evaporation or sputtering

Methodology Applied
Scientific EffectCathodic Arc Evaporation: Cathodic Arc Deposition

Implementation Method 3

achieved through cathodic arc evaporation or sputtering

Methodology Applied
Scientific EffectSputtering: Sputtering

Data Source

PatentUS20220220601A1PVD coatings comprising multi-anion high entropy alloy oxy-nitrides
Publication Date: 2022.07.14
  • US20220220601A1 patent drawing
  • US20220220601A1 patent drawing
  • US20220220601A1 patent drawing

AI summary

Method for producing a coating comprising at least one PVD coating layer, wherein for the production of the at least one PVD coating layer materials from one or more targets are evaporated by using a PVD technique in a coating chamber comprising oxygen and nitrogen as reactive gases, wherein during deposition of the at least one PVD coating layer a multi-anion HEA-oxynitride structure is formed, which comprises a cation lattice formed of five or more elements and an anion lattice formed of two or more elements, wherein if only two elements are present in the anion lattice, they are oxygen and nitrogen.