Head-Integrated Atomic Force Microscope for High-Rate Scanning
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Solution Overview
Problem
Existing atomic force microscopes (AFMs) face challenges in achieving high-rate scanning and precise observation due to external vibrations, which affect the reliability and accuracy of measurements, and their large size and weight hinder the ability to perform high-rate scans on large-area samples.
Innovation Solution
The development of a head-integrated AFM with a minimized weight and volume, featuring an integrated structure that includes a measuring part, source part, and sensing part, optimized to reduce mechanical vibrations and improve dynamic characteristics, allowing for high-rate scanning and precise observation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If a conventional AFM structure is used, then measurement precision is maintained, but device weight and volume are large, hindering high-rate scanning
Solution Approach 1:
The AFM system is divided into a stationary base and a movable head portion. The head portion contains only the essential scanning components (scan head, mirrors, cantilever), while the light source and detector remain stationary. This segmentation reduces the moving mass, enabling high-rate scanning.
Solution Approach 2:
The optical path is configured to travel through multiple dimensions (downward to the sample, then upward to the detector) rather than in a straight line. This allows the detector to be positioned away from the scanning path, reducing the weight that needs to be moved during scanning.
2Speed
If a conventional AFM structure is used, then measurement precision is maintained, but device volume is large, affecting portability and scanning efficiency
Solution Approach 1:
The AFM system is divided into a stationary base and a movable head portion. The head portion contains only the essential scanning components (scan head, mirrors, cantilever), while the light source and detector remain stationary. This segmentation reduces the moving mass, enabling high-rate scanning.
Solution Approach 2:
The optical components (mirrors, cantilever) are nested within a compact scan head structure. The cantilever is positioned within the scan head, and the optical path is folded through the head structure, minimizing the overall volume of the moving portion.
3Speed
If the head is miniaturized for high-rate scanning, then scanning speed improves, but structural stability may be compromised
Solution Approach 1:
The AFM system is divided into a stationary base and a movable head portion. The head portion contains only the essential scanning components (scan head, mirrors, cantilever), while the light source and detector remain stationary. This segmentation reduces the moving mass, enabling high-rate scanning.
Solution Approach 2:
The scan head is constructed using materials with high stiffness-to-weight ratio (such as aluminum alloy or titanium alloy), providing structural stability while maintaining low weight for high-rate scanning capability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The head-integrated AFM achieves improved structural stability and dynamic characteristics, enabling high-rate scanning of large-area samples with enhanced precision and reliability, maximizing the efficiency and accuracy of micro observations.
Implementation Method 1
a light source part 220 provided at a distal end of one side of the penetrating path 125... an optical path P is formed so that light passing through the penetrating path 125 from the light source part 220 is incident to the first mirror 211, light reflected on the first mirror 211 is incident to an upper surface of the tip 215
Implementation Method 2
a position-sensitive photo detector (PSPD) 230 accommodated on the accommodating path 135... light reflected on the second mirror 212 is incident to and sensed in the PSPD 230
Data Source
AI summary
An object of the application is to provide a head-integrated for an atomic force microscope capable of realizing minimization of a weight and a volume and improvement of structural stability by optimizing a head structure of the atomic force microscope. Another object of the application is to provide a head-integrated atomic force microscope capable of being utilized for imaging a large-area sample by enabling high-rate head scan due to dynamic characteristics improved by mounting the integrated-head described above. Still another object of the application is to provide a composite microscope including a head-integrated atomic force microscope, capable of performing high-rate position search and imaging and performing precise observation of a three-dimensional shape up to an atomic image level in a region of interest by combining the head-integrated atomic force microscope having the improved dynamic characteristics as described above and an electron microscope or an optical microscope with each other.