Hearth Liner Material Supply Control Using Molten Surface Height
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Solution Overview
Problem
Existing film-forming apparatuses struggle to supply the appropriate amount of film-forming material to the hearth liner, leading to issues such as material depletion during film formation, overheating, and material overflow, which results in particle generation and increased costs.
Innovation Solution
The apparatus measures the height of the molten surface of the film-forming material in the hearth liner, calculates the required mass based on this measurement, and controls the material supplier to deliver the calculated mass to the hearth liner.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the amount of film-forming material supplied to the hearth liner is not controlled, then the material supply process is simple, but the material may run out during film formation causing overheating and particle generation
Solution Approach 1:
The patent implements a feedback control system where the height of the molten material surface is measured and this information is fed back to the controller. The controller adjusts the material supply amount based on this feedback to maintain appropriate material levels in the hearth liner, preventing both material depletion and overflow.
Solution Approach 2:
The patent replaces manual or simple mechanical material supply methods with an automated control system that uses height measurement (optical or sensor-based) and electronic control to regulate material supply, substituting mechanical guesswork with precise measurement and control.
2Quantity of substance
If the amount of film-forming material supplied is unduly large, then the hearth liner is fully stocked, but the material may overflow from the hearth liner resulting in high material costs
Solution Approach 1:
The feedback control system continuously monitors the material height and adjusts supply accordingly. When the material reaches the appropriate level, the system automatically stops supply, preventing overflow and material waste while ensuring sufficient material is supplied when needed.
Solution Approach 2:
The patent changes the control parameter from fixed material supply amounts to dynamic supply based on measured material height. The controller adjusts the supply parameter in real-time based on the actual material level, optimizing both material utilization and preventing waste.
3Loss of substance
If the amount of film-forming material supplied is unduly small, then material cost is reduced, but the material may run out during film formation causing overheating
Solution Approach 1:
The system uses feedback from material height measurement to ensure sufficient material is supplied to prevent overheating. The controller monitors material levels and adjusts supply to maintain appropriate reserves, preventing the hearth liner from overheating due to material depletion while controlling material costs.
4Measurement precision
If weight measurement is used to control material supply, then material quantity can be measured, but the amount supplied may not be appropriate relative to the hearth liner's accommodation volume
Solution Approach 1:
The patent substitutes weight measurement with height measurement of the molten material surface. This optical or sensor-based measurement directly indicates the material level relative to the hearth liner's accommodation volume, providing both precision in measurement and appropriateness in supply control.
Solution Approach 2:
The patent changes the measurement parameter from mass (weight) to geometric dimension (height). This allows direct correlation between the measured height and the hearth liner's accommodation volume, enabling precise control of material supply appropriateness rather than just quantity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method ensures the appropriate supply of film-forming material, preventing overheating and overflow, thereby reducing material waste and costs while maintaining consistent film formation.
Implementation Method 1
a heat source that heats the film-forming material accommodated in the hearth liner
Implementation Method 2
the film-forming apparatus suitable for applying a vacuum deposition method
Data Source
Figure 1
Figure 2
Figure 3A
AI summary
In order to supply the appropriate amount of material relative to the accommodation volume of a hearth liner, an embodiment comprises: a film-forming chamber (2) in which at least a film-forming material (M) and a film formation object (S) are provided and which can be set to a predetermined film-forming atmosphere; a hearth liner (23) that is provided inside the film-forming chamber and accommodates the film-forming material; a heat source (24) that is provided inside the film-forming chamber and heats the film-forming material accommodated in the hearth liner; a material supplier (3) that supplies the film-forming material to the hearth liner; a height gauge (4) that measures a height of a molten surface of the film-forming material accommodated in the hearth liner; and a controller (6) that calculates, based on the height of the molten surface measured by the height gauge, a mass of the film-forming material to be supplied and controls the material supplier so as to supply the calculated mass of the film-forming material to the hearth liner.