Heat Dissipation Plate for Mask Frame Alignment in Deposition
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Solution Overview
Problem
The existing deposition apparatuses face challenges in achieving precise and reliable deposition of light-emitting patterns due to misalignment of masks, leading to defects in display panels.
Innovation Solution
A deposition apparatus is designed with a heat dissipation plate that includes a flat portion and an inclined portion, strategically positioned between the deposition member and the mask frame, to prevent thermal deformation of the mask frame during the deposition process, thereby improving precision and reliability by maintaining the mask frame's alignment and stability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a large-area mask is used to improve production yield, then the deposition area is increased, but thermal deformation of the mask frame occurs leading to misalignment
Solution Approach 1:
A heat dissipation plate is introduced as an intermediary component between the deposition member and the mask frame. This plate absorbs and dissipates heat generated during the deposition process, preventing thermal deformation of the mask frame while allowing the use of large-area masks for high productivity.
Solution Approach 2:
The heat dissipation plate changes the thermal parameters of the system by providing a dedicated heat dissipation path. This allows the mask frame to maintain its dimensional stability and alignment precision even during prolonged deposition operations with large-area masks.
2Manufacturing precision
If the mask is positioned closer to the deposition member to improve deposition uniformity, then deposition precision is improved, but thermal deformation of the mask frame increases
Solution Approach 1:
The heat dissipation plate serves as a thermal intermediary that decouples the thermal relationship between the deposition member and the mask frame. This allows the mask to be positioned optimally for deposition uniformity while the heat dissipation plate manages the thermal load, preventing excessive temperature rise in the mask frame.
3Productivity
If continuous deposition is performed to improve productivity, then production efficiency is increased, but thermal accumulation causes mask frame deformation
Solution Approach 1:
The heat dissipation plate enables continuous deposition operations by continuously managing heat removal. The plate's heat dissipation structure allows thermal energy to be continuously evacuated, preventing thermal accumulation that would otherwise cause mask frame deformation during prolonged operation.
Solution Approach 2:
The heat dissipation plate converts the harmful thermal energy generated during continuous deposition into a manageable thermal flow. By providing a dedicated heat dissipation path, the plate transforms thermal accumulation (a harmful effect) into controlled heat transfer, maintaining mask frame stability during high-productivity continuous operations.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enhances deposition precision and reliability by preventing thermal deformation of the mask frame, ensuring accurate formation of light-emitting patterns and reducing defects in display panels.
Implementation Method 1
a heat dissipation plate disposed between the deposition member and a mask of the plurality of masks and covering the first rear surface, the first inner side surface, and the second side inner surface
Data Source
AI summary
A deposition apparatus includes a deposition member providing a deposition material, a stage including a first rear surface, a first front surface opposite to the first rear surface, and a first inner side surface extended to the first rear surface and the first front surface and defining a first opening, a mask frame including a second rear surface facing the first front surface, a second front surface opposite to the second rear surface, and a second inner side surface extended to the second front surface and the second rear surface and defining a second opening, masks disposed on the second front surface and each being provided with a plurality of deposition openings defined therethrough to correspond to the second opening, and a heat dissipation plate disposed between the deposition member and the stage and covering the first rear surface, the first inner side surface, and the second side inner surface.