Heat Equalizer Structure for Uniform Evaporation Heating

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Solution Overview

Problem

Conventional evaporation apparatuses for organic EL material processing suffer from non-uniform temperature distribution within the container, leading to incomplete and uneven evaporation, which hinders precise film formation due to the heating of the outer surface rather than the inner surface where the material is deposited, resulting in temperature differences and prolonged stabilization times.

Innovation Solution

A heat equalizer design featuring an inner and outer container with a working fluid held in the gap between them, where the inner container has protrusions and depressions for enhanced heat transfer, allowing the gaseous working fluid to condense and re-evaporate, uniformly heating the inner surface and maintaining precise temperature control.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If the outer surface of the container is heated by a heater, then the container temperature increases, but the inner surface temperature distribution becomes non-uniform

Engineering Contradiction:
Improvecontainer temperatureVSAvoidtemperature uniformity
Core Design Contradiction:
TemperatureVSManufacturing precision

Solution Approach 1:

Instead of heating the outer surface and relying on heat conduction to the inner surface, the invention inverts the approach by directly heating the inner surface through a heater disposed on the inner wall of the container. This ensures uniform temperature distribution across the material-contact surface, directly addressing the temperature uniformity problem while maintaining effective heating.

Inventive Principle:
Principle #13The other way round (Inversion)

Solution Approach 2:

The invention introduces a heater as an intermediary element positioned between the heat source and the material. This heater is specifically disposed on the inner wall surface to act as a mediator that transfers heat uniformly to the material, eliminating the temperature distribution issues caused by outer-surface heating and heat conduction through the container wall.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Temperature

If outer surface heating is used, then heating capability is achieved, but the time for temperature stabilization increases

Engineering Contradiction:
Improveheating capabilityVSAvoidtemperature stabilization time
Core Design Contradiction:
TemperatureVSLoss of time

Solution Approach 1:

By inverting the heating approach to directly heat the inner surface where the material contacts the container wall, the system achieves faster temperature stabilization. This eliminates the time-consuming heat conduction process through the container wall, reducing the stabilization time from three or more hours to a much shorter duration while maintaining effective heating capability.

Inventive Principle:
Principle #13The other way round (Inversion)

Solution Approach 2:

The heater disposed on the inner wall surface provides continuous and direct heating action to the material throughout the heating process. This eliminates the intermittent and inefficient heat transfer through the container wall, ensuring continuous useful heating action that rapidly stabilizes the temperature without the delays associated with outer-surface heating methods.

Inventive Principle:
Principle #20Continuity of useful action

3Productivity

If the material melt has temperature differences, then evaporation occurs at different rates, but precise film-forming cannot be achieved

Engineering Contradiction:
Improveevaporation rateVSAvoidfilm-forming precision
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The invention inverts the heating location from the outer surface to the inner surface in direct contact with the material. This ensures that the entire material melt, including both surface and central portions, receives uniform heat simultaneously. As a result, the material evaporates uniformly across the entire surface, enabling precise film-forming while maintaining high evaporation rates.

Inventive Principle:
Principle #13The other way round (Inversion)

Solution Approach 2:

The heater disposed on the inner wall surface creates homogeneous temperature distribution across the material-contact surface. This homogeneity ensures that all portions of the material melt experience the same temperature conditions, leading to uniform evaporation rates and precise film formation, eliminating the temperature differences that previously caused non-uniform evaporation.

Inventive Principle:
Principle #33Homogeneity

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design ensures a uniform temperature distribution across the inner container, allowing for precise control of the evaporation process, enhancing the efficiency and precision of film formation in vapor deposition processes.

Implementation Method 1

heating means placed at a bottom of the outer container... capable of receiving a vaporized working fluid

Methodology Applied
Scientific EffectVaporization: Evaporation

Implementation Method 2

A gaseous working fluid is cooled to be condensed on the inner wall surface of the depressions formed at the inner container

Methodology Applied
Scientific EffectCondensation: Condensation

Implementation Method 3

The heating means is placed at a bottom of the outer container... heating means placed at a bottom of the outer container

Methodology Applied
Scientific EffectHeat conduction: Conduction (thermal)

Implementation Method 4

a plurality of protrusions protruding toward an inside of the inner container, and depressions formed by the bottom surface depressed inward of the protrusions and capable of receiving a vaporized working fluid

Methodology Applied
Scientific EffectHeat transfer: Conduction (thermal)

Data Source

PatentUS20110023862A1Heat equalizer
Publication Date: 2011.02.03 TMEIC CORP
  • US20110023862A1 patent drawing
  • US20110023862A1 patent drawing
  • US20110023862A1 patent drawing

AI summary

A heat equalizer includes a container structure, a material feed pipe, and a heating mechanism. The container structure includes an inner container and an outer container. In the outer container, a working fluid is held. Respective upper ends of the inner container and the outer container are joined to form a hollow portion between the inner container and the outer container. The material feed pipe extends from an outside of the container structure to the inner surface of the inner container. The heating mechanism is placed at the bottom of the outer container. At the bottom surface of the inner container, a plurality of protrusions protruding toward the inside of the inner container and depressions formed by the bottom surface depressed inward of the protrusions and capable of receiving the vaporized working fluid are formed.