Heat-Medium Pressure Feedback for Stable Substrate Temperature Control
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Solution Overview
Problem
Existing substrate processing apparatuses face challenges in maintaining stable temperature controllability due to variations in pressure within the circulation lines of heat media, leading to unstable pump operations and excessive heat loss, which deteriorate temperature control performance.
Innovation Solution
A temperature controller system that includes a supply and return line configuration with pressure sensors and pumps, controlled by a controller to manage discharge pressure based on detected pressure differences, ensuring consistent pressure and improved temperature control through feedback mechanisms.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If pressure control is not implemented in the heat medium circulation system, then the system structure remains simple, but temperature controllability deteriorates due to pressure variations
Solution Approach 1:
The patent implements feedback control by detecting the actual discharge pressure of the pump with a pressure sensor and comparing it to a target pressure value. The controller adjusts the pump operation based on the pressure difference to maintain stable pressure in the heat medium circulation system, thereby improving temperature controllability without excessive system complexity
Solution Approach 2:
The patent changes the control parameter from direct temperature control to pressure control of the heat medium. By controlling the discharge pressure of the pump to a target value, the system indirectly achieves better temperature controllability of the substrate support, as pressure stability ensures consistent heat medium delivery
2Loss of energy
If pump discharge pressure varies, then the system operation is simpler without pressure control, but heat loss increases and temperature control performance deteriorates
Solution Approach 1:
The feedback control mechanism continuously monitors discharge pressure and adjusts pump operation to maintain target pressure. This ensures consistent heat medium circulation, reducing unnecessary heat loss while maintaining reliable temperature control performance of the substrate support
3Measurement precision
If pressure sensor is installed immediately after the pump, then discharge pressure can be controlled accurately, but the system requires additional components
Solution Approach 1:
The pressure sensor is strategically installed immediately after the pump discharge to directly measure the pressure being controlled. This positioning provides accurate feedback for pressure control while minimizing the number of sensors needed, as one well-placed sensor captures the critical pressure parameter
Solution Approach 2:
The pressure sensor is placed at the specific location where pressure control is most critical - immediately after the pump discharge. This localized measurement provides the most relevant data for controlling pump operation, ensuring accurate pressure control without needing sensors throughout the entire circulation system
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system enhances temperature controllability by stabilizing pressure variations, reducing alarm stops, and minimizing heat loss, thereby maintaining precise temperature control during substrate processing.
Implementation Method 1
a pressure sensor configured to detect a pressure in the supply line disposed immediately after the pump
Implementation Method 2
a pump configured to discharge the heat medium to the supply line
Implementation Method 3
temperature control is performed by circulating brine that is a heat medium through a flow path in a substrate support
Data Source
AI summary
A temperature controller includes a supply line configured to supply a heat medium to at least one control target, a return line configured to return the heat medium from control target, a pump configured to discharge the heat medium to the supply line, a pressure sensor configured to detect a pressure in the supply line disposed immediately after the pump, and a controller. The controller is configured to control the temperature controller to control a discharge pressure of the pump based on a difference between the pressure detected by the pressure sensor and a set value of the discharge pressure of the pump.