Heat Pipe Electrode Temperature Control With Electrical Decoupling
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Solution Overview
Problem
Conventional temperature control systems for electrodes, such as fluid systems and resistive heaters, suffer from inefficiencies like power dissipation, limited temperature range, and the inability to achieve uniform temperature control, especially for high-frequency electrodes, and pose risks like leaks and damage from electromagnetic interference.
Innovation Solution
A system utilizing heat pipes with a coupling element and a temperature control apparatus that allows for both heating and cooling, ensuring electrical decoupling and uniform temperature distribution across the electrode, using heat pipes with high heat flux density and a coupling element with enhanced thermal conductivity for efficient heat transfer.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If fluid systems are used for temperature control, then temperature control is achieved, but power is dissipated to the outside and uniform temperature control is compromised
Solution Approach 1:
The patent introduces an electrically insulating intermediate layer between the electrode and the temperature control apparatus. This intermediary layer prevents direct electrical contact, eliminating the need for complex filter circuits while allowing thermal energy transfer. The intermediate layer acts as a thermal conductor that is electrically insulating, thus mediating between the electrode and the temperature control system to prevent power dissipation to the outside.
2Temperature
If fluid systems are used for temperature control, then temperature control is achieved, but uniform temperature distribution is compromised due to temperature differences between entry and outlet
Solution Approach 1:
The patent replaces the mechanical fluid flow system with a thermal field-based system using heat pipes. Instead of relying on fluid circulation that creates temperature gradients along the flow path, the invention uses heat pipes that conduct thermal energy through phase change and capillary action, providing uniform heat distribution across the electrode surface without the temperature differences inherent in fluid systems.
3Temperature
If fluid systems are used for temperature control, then temperature control is achieved, but leak risk increases requiring elaborate insulation
Solution Approach 1:
The patent eliminates the fluid circulation system entirely and replaces it with a solid-state heat pipe-based temperature control system. This substitution removes the risk of fluid leaks that plague conventional systems. The heat pipes are sealed units that transfer thermal energy without requiring fluid flow through the processing chamber, thereby eliminating leak risks and the need for elaborate insulation and filter circuits.
4Temperature
If resistive heaters are used for temperature control, then heating is achieved, but active cooling is not possible and electrical decoupling is required
Solution Approach 1:
The patent implements a universal temperature control system using heat pipes that can perform both heating and cooling functions. The heat pipe system is coupled with a temperature control apparatus that can either supply thermal energy for heating or remove thermal energy for cooling. This multi-functional approach replaces the single-function resistive heater, providing adaptability for both heating and cooling operations while maintaining electrical decoupling through the insulating intermediate layer.
5Reliability
If elaborate insulation or filter circuits are used for electrical decoupling, then electrical decoupling is achieved, but device complexity increases
Solution Approach 1:
The patent uses a simple electrically insulating intermediate layer as a mediator between the electrode and the temperature control apparatus. This single intermediate component provides sufficient electrical decoupling for high-frequency electrodes without requiring complex filter circuits or elaborate insulation systems. The intermediate layer is a thin film that is electrically insulating but thermally conductive, greatly simplifying the overall system design while maintaining reliable electrical decoupling.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables very uniform temperature distribution (≤0.5 K), quick heat transfer, minimizes electrical losses, and reduces maintenance needs while preventing damage to the temperature control apparatus, all while allowing for both heating and cooling of electrodes.
Implementation Method 1
The invention makes use of heat pipes, in particular for cooling elements in coating facilities
Implementation Method 2
System for electrically decoupled, homogeneous temperature control of an electrode by means of heat conduction tubes
Data Source
AI summary
The invention relates to a system for temperature control of an electrode. The system comprises at least one heat pipe, a coupling element and a temperature control apparatus. In this case, the heat pipe is suitable for being arranged in the electrode at least in part and by means of at least one first end. The coupling element is suitable for heating or cooling a second end of the heat pipe, while the temperature control apparatus is suitable for heating or cooling the coupling element. In this case, the electrode and the temperature control apparatus are galvanically separated from one another. The invention further relates to a treatment facility comprising a treatment chamber and at least one electrode inside the treatment chamber and at least one system of this kind for temperature control of an electrode.