Heat Spreader Layer in Semiconductor Packaging for Hot Spot Cooling

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

New packaging technologies for semiconductor dies face manufacturing challenges as they strive to improve density and functionality while managing heat dissipation effectively.

Innovation Solution

A package structure with a heat spreader layer is introduced, which is formed over semiconductor dies to dissipate heat laterally, reducing the temperature at hot spots and improving the performance of the package structure.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If new packaging technologies are used to improve density and functionality, then the number of interconnected devices per chip area increases, but heat dissipation becomes more difficult and manufacturing challenges arise

Engineering Contradiction:
Improveproduction efficiencyVSAvoidheat dissipation
Core Design Contradiction:
ProductivityVSTemperature

Solution Approach 1:

The package structure is divided into multiple functional layers including a heat spreader layer, encapsulant layer, and interconnect layers. The heat spreader layer is specifically segmented to include heat dissipation features that are distributed throughout the package structure, allowing heat to be managed in different zones rather than concentrated in one area.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

A heat spreader layer is introduced as an intermediary component between the semiconductor devices and the package substrate. This heat spreader acts as a thermal mediator that conducts heat away from the high-density interconnect regions and distributes it across a larger area, facilitating effective heat dissipation without compromising the high-density packaging.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Productivity

If feature sizes are decreased to improve functional density, then the number of interconnected devices increases, but manufacturing precision requirements increase

Engineering Contradiction:
Improvefunctional densityVSAvoidfeature size control
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The package structure incorporates pre-formed heat spreader layers and thermal management features that are prepared before the final assembly of high-density interconnects. This preliminary preparation of thermal pathways allows for better control of heat flow in high-density configurations without requiring post-assembly adjustments that would demand even higher precision.

Inventive Principle:
Principle #10Preliminary action

3Volume of moving object

If package size is reduced to take up less space, then space efficiency improves, but heat dissipation capacity decreases

Engineering Contradiction:
Improvepackage sizeVSAvoidheat dissipation capacity
Core Design Contradiction:
Volume of moving objectVSTemperature

Solution Approach 1:

The heat spreader layer extends laterally beyond the immediate device area, utilizing the horizontal plane for heat distribution rather than relying solely on vertical heat paths. This dimensional approach allows heat to be spread across a larger surface area within the constrained package volume, improving heat dissipation capacity without increasing the overall package footprint.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The heat spreader layer effectively reduces the temperature of the package structure by 8-10°C at semiconductor dies and 3°C at package components, enhancing the overall performance of the semiconductor device.

Implementation Method 1

a heat spreader layer, which is formed over the semiconductor dies to dissipate heat laterally

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Data Source

PatentUS20250210609A1Package structure with heat spreader layer and method for manufacturing the same
Publication Date: 2025.06.26 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US20250210609A1 patent drawing
  • US20250210609A1 patent drawing
  • US20250210609A1 patent drawing

AI summary

A package structure and method for manufacturing the same are provided. The package structure includes a first redistribution structure and a first package component and a second package component attached to a first side of the first redistribution structure and spaced apart from each other. The package structure further includes a first semiconductor die attached to a second side of the first redistribution structure and an encapsulant. The package structure further includes a heat spreader layer formed over the first semiconductor die, and a thermal conductivity of the heat spreader layer is greater than a thermal conductivity of the encapsulant. The package structure further includes a conductive feature formed through the heat spreader layer and a second redistribution structure formed over the heat spreader layer. In addition, the second retribution structure is electrically connected to the first semiconductor die through the conductive feature.