Heat-Storage Vaporizer for High-Flow Carrier-Gas-Free Processing
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Solution Overview
Problem
Existing vaporization methods require a carrier gas and are limited by low flow rates of the vaporization target liquid.
Innovation Solution
A vaporizer with a heat storage body and embedded heaters that supplies heat to vaporize the target liquid without a carrier gas, using a heat storage body flow path and a downstream pipe to ensure efficient vaporization of high flow rate liquids.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If multiple separate devices are used for cleaning, drying, and inspecting workpieces, then each function can be performed effectively, but the number of devices increases and space requirements increase
Solution Approach 1:
The patent combines cleaning, drying, and inspection functions into a single integrated processing device. The housing contains all three functional units (cleaning unit with spray nozzle, drying unit with drying blade, and inspection unit with sensor) that sequentially process workpieces on a conveyor belt, eliminating the need for multiple separate devices while maintaining processing effectiveness
Solution Approach 2:
The integrated processing device performs multiple functions simultaneously - the cleaning unit removes contaminants, the drying unit eliminates moisture, and the inspection unit detects workpiece quality, all within one device structure. This multi-functional approach reduces the total number of devices required in the manufacturing system
2Reliability
If multiple separate devices are used for cleaning, drying, and inspecting workpieces, then each function can be performed effectively, but the space occupied increases
Solution Approach 1:
The patent consolidates cleaning, drying, and inspection functions into a single housing structure that occupies less floor space than multiple separate devices would require. The compact arrangement of functional units within one device reduces the overall spatial footprint while maintaining all necessary processing capabilities
Solution Approach 2:
The functional units are nested within a common housing structure, with the cleaning unit, drying unit, and inspection unit arranged in sequence within the same physical enclosure. This nesting approach maximizes space utilization and minimizes the total area occupied by the processing system
3Productivity
If manual cleaning and drying methods are used, then equipment cost is lower, but productivity decreases and workpiece quality becomes unstable
Solution Approach 1:
The cleaning and drying units automatically perform their functions without manual intervention. The spray nozzle automatically cleans workpieces while the conveyor moves them, and the drying blade automatically removes moisture, enabling continuous automated processing that improves productivity while maintaining consistent quality
Solution Approach 2:
The patent replaces manual cleaning and drying operations with automated mechanical systems - an electronically controlled spray nozzle for cleaning and a mechanically actuated drying blade for moisture removal. This substitution eliminates manual labor, increases processing speed, and ensures consistent application of cleaning and drying parameters
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables efficient vaporization of high flow rate liquids without carrier gases, promoting complete vaporization and improving vaporization efficiency by maintaining heat supply and creating negative pressure in the vaporization chamber.
Implementation Method 1
a heat storage body 11 having a heat capacity higher than that of a vaporization target liquid Fq by a predetermined ratio
Implementation Method 2
the amount of heat transferred from the heat storage body 11 to the vaporization target liquid Fq is an amount of heat necessary to vaporize the vaporization target liquid Fq
Implementation Method 3
a heat supplier 20 for suppling heat to the vaporization part 10
Data Source
Figure 1
Figure 2A~2B
Figure 3
AI summary
Provided are a workpiece processing device that includes a vaporizing device to vaporize a liquid to be vaporized having a comparatively large flow rate without requiring a carrier gas, and a manufacturing method for processed workpieces. A vaporizing device 1 comprises a vaporizing unit 10 that includes a heat storage body 11 having a heat capacity larger by a prescribed ratio than a carboxylic acid liquid Fq to be vaporized, and a heat supplier 20 that supplies heat to the vaporizing unit 10. The prescribed ratio is a heat capacity ratio in which a temperature decrease in the heat storage body 11 is within a predetermined range when the quantity of heat required when vaporizing the liquid Fq to be vaporized to a planned ratio by the liquid Fq to be vaporized flowing in a heat storage body channel 12 is transmitted from the heat storage body 11 to the liquid Fq to be vaporized. A workpiece processing device 100 comprises the vaporizing device 1, a chamber 5, and a vacuum pump 6 to create negative pressure in the chamber 5. A manufacturing method for processed workpieces performs prescribed processing on a workpiece W under the atmosphere of a processing gas Fg in the chamber 5 by loading the workpiece W into the chamber 5 and supplying the processing gas Fg generated with the vaporizing device 1 into the chamber 5.