Heat Transfer Gas Recirculation for Substrate Pressure Control
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Solution Overview
Problem
Existing substrate processing apparatuses consume a significant amount of heat transfer gas due to inefficient recycling and pressure management in the gas supply system.
Innovation Solution
A gas supply system with a gas recovery line that recycles heat transfer gas back to the supply line, incorporating a pressure controller and pump to regulate pressure and share a common portion with the supply line, thereby reducing gas consumption and preventing pressure buildup.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If heat transfer gas is supplied continuously to the gap between substrate support and substrate back surface, then heat exchange efficiency is improved, but gas consumption increases
Solution Approach 1:
The patent implements a gas recovery line that collects heat transfer gas from the gap region and returns it to the gas supply line. This recycling mechanism recovers the gas that would otherwise be discarded, maintaining continuous heat exchange efficiency while significantly reducing overall gas consumption by reusing the same gas multiple times.
Solution Approach 2:
The system maintains continuous heat exchange by continuously circulating heat transfer gas through both the supply line and recovery line. The gas flows continuously through the gap between substrate support and substrate back surface, ensuring uninterrupted thermal contact and heat transfer efficiency.
2Temperature
If gas supply pressure is increased to improve heat transfer, then heat exchange efficiency is improved, but pressure buildup occurs in the system
Solution Approach 1:
The gas supply system is segmented into distinct functional portions: a first portion for gas supply, a second portion for gas recovery, and a third portion connecting them. This segmentation allows independent pressure control in each section, enabling efficient heat transfer in the third portion while preventing pressure buildup in the supply and recovery portions through separate pressure management.
Solution Approach 2:
The third portion acts as an intermediary connection between the first (supply) and second (recovery) portions. This intermediate section facilitates controlled gas flow and pressure regulation, allowing the system to maintain optimal pressure for heat transfer while the pump and valve structures prevent pressure accumulation in the overall system.
3Loss of substance
If separate supply and recovery lines are used, then gas recycling efficiency is improved, but system complexity increases
Solution Approach 1:
The gas supply line and gas recovery line are merged by having them share the third portion. This configuration allows the system to maintain separate supply and recovery functions (improving recycling efficiency) while reducing overall system complexity by eliminating redundant piping. The shared third portion serves both lines, creating a more compact and simpler gas line configuration.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system effectively reduces heat transfer gas consumption by recycling it within the system, preventing pressure increases, and simplifies the gas line configuration.
Implementation Method 1
The gas recovery line includes a pump that is connected between the first portion and the second portion. The gas recovery line is configured to return the heat transfer gas from the second portion to the first portion.
Implementation Method 2
The pressure controller is configured to regulate a pressure of the heat transfer gas and connected between the first portion and the second portion.
Implementation Method 3
The plasma processing apparatus is configured to supply a heat transfer gas to a gap between the placement table and the substrate in order to promote heat exchange between the placement table and the substrate.
Data Source
AI summary
A disclosed gas supply system includes a gas supply line and a gas recovery line. The gas supply line supplies a heat transfer gas to a gap between a substrate support and a back surface of a substrate. The gas supply line includes first to third portions and a pressure controller. The second portion extends downstream of the first portion. The pressure controller regulates a pressure of the heat transfer gas and is connected between the first portion and the second portion. The third portion connects the second portion and the gap. The gas recovery line is connected to the first and second portions. The gas recovery line includes a pump connected between the first and the second portions. The gas recovery line shares the third portion with the gas supply line. The gas recovery line returns the heat transfer gas from the second portion to the first portion.