Heat Treatment Temperature Control Using an Individual Simulation Model
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Solution Overview
Problem
Existing heat treatment apparatuses struggle to achieve uniform temperature distribution across substrates due to apparatus-specific differences, leading to inconsistent heat treatment results.
Innovation Solution
A simulation-based approach using a digital twin technology to modify a standard simulation model into an individual simulation model that reflects the specific apparatus differences, allowing for precise temperature control and uniformity by predicting and correcting target temperatures.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If temperature sensors are provided at predetermined locations to measure temperature distribution, then temperature measurement capability is provided, but measurement precision is insufficient at positions between sensors
Solution Approach 1:
The patent creates a virtual copy (digital twin) of the heat treatment apparatus that replicates its thermal characteristics. This virtual model allows temperature distribution to be measured and analyzed at any position within the treatment chamber without physically placing sensors everywhere, thereby achieving high measurement precision while avoiding the complexity of dense sensor arrays.
Solution Approach 2:
The patent replaces the physical mechanical system of multiple temperature sensors with a computational simulation system. The simulation model calculates temperature distribution based on heater characteristics and thermal properties, substituting physical measurement infrastructure with virtual modeling to achieve comprehensive temperature data.
2Productivity
If a standard simulation model is used for temperature prediction, then calculation speed is improved, but manufacturing precision deteriorates due to apparatus differences
Solution Approach 1:
The patent modifies the simulation model parameters to reflect the specific characteristics of each individual heat treatment apparatus. By adjusting thermal conductivity, heat capacity, and heater efficiency parameters based on actual apparatus measurements, the simulation maintains high calculation speed while achieving accurate temperature predictions that account for apparatus-specific variations.
Solution Approach 2:
The system performs self-characterization by automatically measuring the thermal response of the specific apparatus and using this data to calibrate the simulation model. This self-service approach allows each apparatus to develop its own customized simulation parameters, ensuring both speed and precision without requiring manual intervention for each device.
3Loss of information
If multiple temperature sensors are installed to measure temperature at all positions, then measurement coverage is improved, but device complexity and cost increase
Solution Approach 1:
The patent creates a comprehensive virtual representation of the treatment chamber that allows temperature information to be accessed at any position through simulation. This digital twin provides complete temperature distribution data without requiring physical sensors at every location, thereby preventing information loss while avoiding the complexity and cost of extensive sensor deployment.
Solution Approach 2:
The simulation model serves multiple functions simultaneously: it predicts temperature distribution, identifies hot and cold spots, optimizes heater control strategies, and provides historical analysis. This single universal tool replaces what would otherwise require multiple specialized measurement systems, reducing overall device complexity while maintaining comprehensive temperature information.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method enhances the uniformity of temperature profiles during heat treatment, improving the consistency and quality of substrate processing by accounting for unique apparatus characteristics.
Implementation Method 1
a heater configured to heat substrates to be treated
Implementation Method 2
a temperature measuring unit configured to measure a temperature distribution, in an array direction of the substrates to be treated, at positions between the heater and the substrates to be treated
Data Source
AI summary
An information processing system includes a temperature measuring unit configured to measure a temperature distribution, in an array direction of substrates to be treated, at positions between a heater and the substrates in a treatment chamber, a memory, and a processor coupled to the memory and configured to perform a simulation of the temperature distribution during performing the heat treatment on the substrates in the treatment chamber, to obtain a standard-simulation temperature distribution by using a standard-simulation model of the heat treatment apparatus, modify the standard-simulation model to obtain an individual-simulation model in which an individual difference of the heat treatment apparatus is reflected, based on a difference between the measured temperature distribution and the obtained standard-simulation temperature distribution, perform the simulation of the temperature distribution to obtain an individual-simulation temperature distribution by using the obtained individual-simulation model, and correct a target temperature by using the obtained individual-simulation temperature distribution.