Heated Lid Thermal Break for O-Ring Integrity
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Solution Overview
Problem
High temperatures at the outer periphery of process chamber lids compromise the integrity of o-rings and lead to increased heat loss, affecting the efficiency of microelectronic device fabrication processes.
Innovation Solution
The implementation of a heated lid with a central region and a peripheral region featuring thermal breaks, including vertical and horizontal slots, and annular plenums with gas supply openings, along with multiple heater rings and coolant channels to maintain temperature control and reduce heat transfer.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If the lid is heated to high temperatures to heat the showerhead, then the showerhead reaches the desired temperature for deposition processes, but the o-ring integrity is compromised and heat loss from outer sidewalls increases
Solution Approach 1:
The lid is divided into a central region and a peripheral region, with the central region heated to high temperatures for showerhead heating while the peripheral region is thermally isolated to protect the o-ring. This spatial segmentation allows different temperature zones within the same component.
Solution Approach 2:
A thermal barrier or insulating structure is introduced between the heated central region and the peripheral region containing the o-ring. This intermediary element prevents heat transfer to the o-ring while allowing the central region to reach necessary temperatures.
2Temperature
If the lid is heated to high temperatures to heat the showerhead, then the showerhead reaches the desired temperature for deposition processes, but heat loss from outer sidewalls increases
Solution Approach 1:
The lid is divided into a central region and a peripheral region, with the central region heated to high temperatures for showerhead heating while the peripheral region is thermally isolated. This segmentation prevents heat loss from outer sidewalls by creating a thermal boundary.
Solution Approach 2:
Different regions of the lid are given different thermal properties - the central region has high thermal conductivity or direct heating to reach showerhead temperature, while the peripheral region has low thermal conductivity or thermal insulation to minimize heat loss from outer sidewalls.
3Reliability
If thermal breaks are added to reduce heat loss and protect the o-ring, then o-ring integrity is maintained and heat loss is reduced, but device complexity increases
Solution Approach 1:
The lid is segmented into central and peripheral regions with thermal breaks at the interface. This segmentation provides a relatively simple way to protect the o-ring and reduce heat loss by introducing discrete insulating elements rather than complex thermal management systems.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design reduces heat loss from the outer sidewalls, maintains o-ring integrity at high temperatures, and enhances the efficiency of microelectronic device fabrication processes by providing precise temperature control and gas distribution.
Implementation Method 1
a first heater ring having one or more heating elements disposed therein, wherein the first heater ring is coupled to the central region of the body; and a second heater ring having one or more heating elements disposed therein
Implementation Method 2
the peripheral region includes a plurality of vertical slots that extend into an upper surface of the body and arranged along a circle to provide a thermal break
Data Source
AI summary
Embodiments of heated lids for a process chamber are provided herein. In some embodiments, a heated lid includes: a body having a central region and a peripheral region, wherein the body includes a central opening in the central region, wherein the peripheral region includes a plurality of vertical slots that extend into an upper surface of the body and arranged along a circle to provide a thermal break, and wherein the body includes one or more annular plenums that extend into the upper surface of the body and a plurality of holes extending through a bottom surface of the one or more annular plenums to a lower surface of the body; a first heater ring having one or more heating elements disposed therein, wherein the first heater ring is coupled to the central region of the body; and a second heater ring having one or more heating elements disposed therein.