Heated Piezoelectric MEMS Mirror Assembly for Long-Range LiDAR

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Solution Overview

Problem

Current LIDAR systems face limitations in maximum illumination power due to eye safety regulations, hindering their ability to reliably detect far-away objects in varying environmental conditions.

Innovation Solution

A MEMS mirror assembly with a piezoelectric actuator and heating resistor is used to enhance LIDAR performance by bending and heating the piezoelectric element, allowing for improved scanning and detection capabilities while adhering to eye safety standards.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If conventional separate heating devices are used, then heating function is provided, but device complexity increases and viewing area is blocked

Engineering Contradiction:
Improveheating functionVSAvoiddevice complexity
Core Design Contradiction:
Ease of operationVSDevice complexity

Solution Approach 1:

The patent combines the heating function with the electrooptical display device by integrating a heating element directly into the display structure. The heating element is positioned behind the display screen and works simultaneously with the display components, eliminating the need for separate heating devices and reducing overall device complexity while maintaining heating functionality.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The display device is designed to perform multiple functions: displaying information and providing heating. By making the display device universal, it can serve both as an information display tool and as a heating device, particularly useful for warming hands or small objects, thereby eliminating the need for dedicated separate heating devices.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Ease of operation

If conventional separate heating devices are used, then heating function is provided, but viewing area is blocked

Engineering Contradiction:
Improveheating functionVSAvoidviewing area
Core Design Contradiction:
Ease of operationVSArea of stationary object

Solution Approach 1:

The heating element is positioned in a different spatial dimension relative to the display screen - specifically, behind the screen rather than in front of it. This dimensional arrangement allows the heating function to be provided without obstructing the viewing area, as the heating element operates in the rear space while the display maintains its full front surface for viewing.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Device complexity

If heating element is integrated into electrooptical display, then device complexity is reduced, but temperature control becomes challenging

Engineering Contradiction:
Improvedevice complexityVSAvoidtemperature control
Core Design Contradiction:
Device complexityVSTemperature

Solution Approach 1:

The patent incorporates a temperature sensor that continuously monitors the temperature on the display surface and provides feedback to the control circuit. Based on this feedback, the control circuit adjusts the power supplied to the heating element to maintain the desired temperature, preventing overheating and ensuring safe operation. This closed-loop control system makes temperature control straightforward despite the integrated design.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The control circuit dynamically changes the electrical parameters (voltage or current) supplied to the heating element based on temperature requirements. By adjusting these parameters in response to temperature conditions, the system achieves precise temperature control while maintaining the simplicity of the integrated design.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enables enhanced LIDAR performance by increasing detection range and reliability in diverse conditions, ensuring compliance with eye safety regulations.

Implementation Method 1

electrooptical display devices... may be difficult to maintain at desirable temperatures in cold environments... including a heating element

Methodology Applied
Scientific EffectJoule heating: Joule Heating

Data Source

PatentEP3861367B1Electrooptical systems having heating elements
Publication Date: 2026.04.29 INNOVIZ TECH LTD
  • EP3861367B1 patent drawingFigure 1A
  • EP3861367B1 patent drawingFigure 1B~1C
  • EP3861367B1 patent drawingFigure 2A

AI summary

A microelectromechanical system (MEMS) mirror assembly may comprise a frame and a MEMS mirror coupled to the frame. The MEMS mirror assembly may also include at least one piezoelectric actuator including a body and a piezoelectric element. When subjected to an electrical field, the piezoelectric element may be configured to bend the body, thereby moving the MEMS mirror with respect to a plane of the frame. The MEMS mirror assembly may further include at least one heating resistor configured to heat the piezoelectric element when an electric current passes through the at least one heating resistor.