Heated Probe Nano-Patterning of Hydrogen-Bonded Polymer Films

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Solution Overview

Problem

Conventional photolithography faces challenges in achieving high-resolution patterning below 65 nm due to limitations such as low wavelength light sources, photoacid migration, photoresist collapse, and lens system quality, while probe-based methods like scanning probe lithography struggle with slow writing times and mechanical stress-induced bit retention issues in data storage.

Innovation Solution

A method involving a polymer film with molecules cross-linked via intermolecular non-covalent bonds, such as hydrogen bonds, is patterned using a heated nano-scale probe to desorb molecules, allowing for fast and precise nano-scale patterning with adjustable temperature and exposure time, enabling high-resolution patterns and potentially three-dimensional structures.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If conventional photolithography is used for high-resolution patterning, then manufacturing precision can be improved, but writing time increases significantly and mechanical stress causes bit retention issues

Engineering Contradiction:
Improvepatterning resolutionVSAvoidwriting time
Core Design Contradiction:
Manufacturing precisionVSLoss of time

Solution Approach 1:

The patent replaces conventional photolithography optical systems with a scanning probe system that uses a heated nano-scale probe to directly desorb molecules from the surface. This substitution of the patterning mechanism enables high-resolution patterns to be written rapidly by locally heating specific positions to desorb molecules, avoiding the time-consuming optical projection process

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the physical state and bonding parameters of the polymer film by using molecules cross-linked via intermolecular non-covalent bonds (such as hydrogen bonds) that require lower energy for desorption. By controlling the probe temperature and exposure time, the system achieves precise patterning with fast writing speeds while maintaining high resolution

Inventive Principle:
Principle #35Parameter changes

2Manufacturing precision

If probe-based methods are used for data storage, then manufacturing precision is improved, but mechanical stress reduces reliability

Engineering Contradiction:
Improvepatterning resolutionVSAvoidbit retention
Core Design Contradiction:
Manufacturing precisionVSReliability

Solution Approach 1:

The patent replaces mechanical contact-based probe methods with a thermal field-based approach. A heated probe creates localized thermal fields that desorb molecules without applying significant mechanical stress to the underlying magnetic layers, thereby maintaining high patterning resolution while improving data retention reliability

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent introduces a polymer film with non-covalently bonded molecules as an intermediary layer between the probe and the data storage medium. This intermediary layer absorbs the thermal energy from the probe and transfers it selectively to specific positions, enabling precise patterning while protecting the underlying magnetic layers from direct mechanical and thermal stress

Inventive Principle:
Principle #24Intermediary (Mediator)

3Ease of manufacture

If conventional photolithography is used, then ease of manufacture is maintained, but manufacturing precision deteriorates at sub-65nm scale

Engineering Contradiction:
Improveprocess simplicityVSAvoidpatterning resolution
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

The patent replaces complex optical lithography systems with a simpler scanning probe system that uses localized thermal fields to desorb molecules. This substitution eliminates the need for complex optical components and enables direct writing of high-resolution patterns, improving both manufacturing simplicity and precision at the nanoscale

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach achieves high-resolution patterns with fast writing times and improved bit retention, overcoming the limitations of conventional photolithography and probe-based methods by using intermolecular bonds that require lower energy for desorption, resulting in efficient and precise nano-scale patterning with potential for three-dimensional structures.

Implementation Method 1

patterning the polymer film by desorbing molecules from the network with a heated, nano-scale dimensioned probe

Methodology Applied
Scientific EffectDesorption: Desorption

Implementation Method 2

The temperature of the probe is approximately between 300°C and 600°C

Methodology Applied
Scientific EffectThermal energy transfer: Conduction (thermal)

Implementation Method 3

A material having a polymer film with a network of molecules cross-linked via intermolecular, non essentially covalent bonds

Methodology Applied
Scientific EffectHydrogen bonding: Chemical Bonding

Data Source

PatentEP2384456B1Method for patterning nano-scale patterns of molecules on a surface of a material
Publication Date: 2017.03.01 SWISSLITHO AG
  • EP2384456B1 patent drawing
  • EP2384456B1 patent drawing
  • EP2384456B1 patent drawing

AI summary

Probe-based methods for patterning a surface of a material are described. In particular, high resolution patterning of molecules on a surface of a material, such as nano-scale patterns with feature sizes of less than 30 nanometers, are described. In one aspect, a method for patterning a surface of a material includes providing a material having a polymer film. A heated, nano-scale dimensioned probe is then used to desorb molecules upon interacting with the film. The film includes a network of molecules (such as molecular glasses) which are cross-linked via intermolecular (noncovalent) bonds, such as hydrogen bonds.