Heated Refill Pipe Assembly for Continuous Liquid Supply
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional systems for heating liquid chemicals in semiconductor fabrication are inefficient due to the high temperature differential between incoming and required temperatures, leading to prolonged pauses in the fabrication process as the refill liquid must be pre-heated to the desired temperature.
Innovation Solution
A pipe system with a valve assembly and a heating system that surrounds a second pipe, allowing the liquid to be heated to the desired temperature before entering the source vessel, ensuring continuous operation by maintaining the temperature differential and reducing heating time.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If conventional heating methods are used to pre-heat refill liquid, then the liquid temperature reaches the desired level, but the fabrication process experiences prolonged pauses and reduced productivity
Solution Approach 1:
The system performs preliminary heating of the refill liquid in a separate pre-heater before the liquid enters the source vessel. This preliminary action ensures the liquid is already at the required temperature when needed, eliminating pauses in the fabrication process and maintaining continuous productivity.
Solution Approach 2:
The heating system is segmented into a separate pre-heating unit and the main source vessel. The pre-heater is a distinct component that prepares the liquid in advance, allowing the source vessel to focus on the chemical reaction process without interruption.
2Temperature
If conventional heating systems are used, then the liquid can be heated, but the heating process is time-consuming and interrupts continuous operation
Solution Approach 1:
The refill liquid is heated in advance in the pre-heater before being transferred to the source vessel. This preliminary heating action eliminates the time loss that would occur if heating had to wait until the vessel needed refill, ensuring continuous operation without interruption.
3Quantity of substance
If the source vessel is refilled with cold liquid, then the vessel can be replenished, but the chemical reaction is interrupted and the process must pause
Solution Approach 1:
The system performs preliminary heating of the refill liquid to the required temperature before it enters the source vessel. This ensures that when the vessel is refilled, the chemical reaction continues without interruption, maintaining productivity and reaction continuity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system efficiently heats the liquid to the required temperature, minimizing pauses in the semiconductor fabrication process and ensuring consistent chemical reactions by maintaining the desired temperature throughout the process.
Implementation Method 1
The second pipe is heated with a heating system that surrounds the second pipe
Data Source
AI summary
An apparatus capable of heating a liquid may provide a valve assembly configured to receive an incoming liquid from a bulk source. The valve assembly may control the flow of the liquid to a source vessel via a pipe system. The pipe system includes a first pipe directly connected to the valve assembly and a second pipe downstream from the first pipe and connected between the first pipe and the source valve. The second pipe is heated with a heating system that surrounds the second pipe, and the second pipe has a larger diameter than that of the first pipe.