Heated Refill Pipe Layout for Continuous Liquid Chemical Heating
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Solution Overview
Problem
Conventional systems for heating liquid chemicals in semiconductor fabrication are inadequate in high-temperature processes due to time-consuming pre-heating of refill liquids, requiring process pauses and inadequate temperature differentials.
Innovation Solution
A system comprising a first pipe connected to a valve assembly and a second pipe downstream, where the second pipe is heated by a surrounding heating system, allowing the liquid to accumulate and reach desired temperatures before entering a source vessel.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If conventional pre-heating methods are used for refill liquid, then the liquid can be heated to desired temperature, but the process becomes time-consuming and requires process pauses
Solution Approach 1:
The system performs preliminary heating of the refill liquid in the second pipe before the liquid enters the source vessel. By pre-heating the liquid in advance through a dedicated heating zone with controlled temperature differential, the system eliminates the need for process pauses during refilling operations.
Solution Approach 2:
The pipe system is segmented into a first pipe and a second pipe, where the second pipe is specifically designated for heating the refill liquid. This segmentation allows the heating function to be separated from the storage and transfer functions, enabling continuous operation without process interruptions.
2Temperature
If conventional pre-heating methods are used for refill liquid, then the liquid can be heated to desired temperature, but the temperature differential is inadequate for high-temperature processes
Solution Approach 1:
The system changes the temperature parameter by maintaining a controlled temperature differential between the heating medium in the second pipe and the refill liquid. This allows adequate heating for high-temperature processes by optimizing the temperature gradient without causing thermal shock or excessive heating rates.
3Temperature
If the second pipe has a larger diameter than the first pipe, then the liquid can accumulate and heat more effectively, but the device complexity increases
Solution Approach 1:
The pipe system employs local quality by varying the pipe diameter at different locations. The second pipe has a larger diameter specifically in the heating zone to allow liquid accumulation and effective heating, while other portions of the system maintain appropriate diameters for their specific functions, optimizing both heating efficiency and system simplicity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables efficient and continuous heating of liquid chemicals to desired temperatures without process pauses, ensuring seamless integration into semiconductor fabrication processes.
Implementation Method 1
The second pipe is heated with a heating system that surrounds the second pipe
Data Source
AI summary
An apparatus capable of heating a liquid may provide a valve assembly configured to receive an incoming liquid from a bulk source. The valve assembly may control the flow of the liquid to a source vessel via a pipe system. The pipe system includes a first pipe directly connected to the valve assembly and a second pipe downstream from the first pipe and connected between the first pipe and the source valve. The second pipe is heated with a heating system that surrounds the second pipe, and the second pipe has a larger diameter than that of the first pipe.