Heated Side Storage Pod With Inert Gas for Substrate Protection
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Solution Overview
Problem
Existing side storage systems in semiconductor manufacturing are inadequate in controlling environmental conditions such as humidity and oxygen levels, which can adversely affect substrates during processing and transit.
Innovation Solution
An indexable side storage pod system is introduced, featuring a sealed enclosure with vertically-spaced storage members and an indexer for robotic access, coupled to an equipment front end module, which includes a heating mechanism for non-reactive gas flow to maintain controlled environments and prevent contamination.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If substrates are stored in existing side storage systems, then substrates can be held during processing, but environmental conditions (humidity and oxygen levels) are not adequately controlled, causing contamination and adverse effects on substrates
Solution Approach 1:
The patent applies inert atmosphere by introducing a non-reactive gas (such as nitrogen or argon) into the side storage pod chamber to displace oxygen and create a protective environment. The gas delivery system supplies this inert gas throughout the chamber, preventing oxidation and contamination of substrates during storage and transit, thereby resolving the contradiction between maintaining substrate protection and preventing harmful environmental exposure
2Reliability
If a sealed enclosure with vertical indexing is implemented, then environmental control is improved, but device complexity increases due to additional indexing mechanisms and gas delivery systems
Solution Approach 1:
The patent applies dynamics by implementing a vertical indexing mechanism that allows the side storage pod chamber to move between different positions (e.g., loaded position, unloaded position, gas delivery position). This dynamic positioning enables the same physical structure to serve multiple functions: storing substrates, controlling environment, and receiving gas delivery, thereby improving environmental control while managing device complexity through functional integration
Solution Approach 2:
The side storage pod chamber serves multiple functions: it stores substrates vertically, maintains controlled environmental conditions through sealing, and receives inert gas delivery for atmosphere control. The indexing mechanism enables the chamber to transition between different operational states, making a single structure perform multiple roles and reducing overall system complexity compared to separate dedicated systems for each function
3Productivity
If vertically-spaced storage members are used with robotic access, then substrate retrieval efficiency is improved, but the need for precise positioning and sealing increases system complexity
Solution Approach 1:
The patent applies segmentation by dividing the storage system into discrete vertically-spaced storage members (such as individual pods or slots) that can be independently accessed. The robot retrieves substrates by targeting specific vertical positions, and the indexing mechanism positions the chamber to align with the robot's access point. This segmentation enables efficient robotic retrieval while the modular design allows sealing and positioning mechanisms to be standardized and simplified
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This system ensures substrates are stored and processed in a controlled, non-reactive environment, reducing exposure to contaminants and improving processing efficiency by maintaining optimal conditions throughout their transport and storage paths.
Implementation Method 1
a heater configured to provide a heated, non-reactive gas flow through the side storage pod chamber and over any substrates stored therein
Data Source
AI summary
A side storage pod includes an outer enclosure having a sealing surface configured to couple to an EFEM and a side storage pod chamber having a body coupled to vertically-spaced storage members. Each of the vertically-spaced storage members is configured to support a corresponding substrate within the body. The side storage pod further includes a removable door. The removable door and the body are to seal relative to each other responsive to the removable door being in a closed position. A load-unload robot of the EFEM is to access the vertically-spaced storage members responsive to the removable door being in an open position. An environment within the side storage pod chamber is to be controlled to be one or more of: at first environmental conditions responsive to the removable door being in the closed position; or at second environmental conditions responsive to the removable door being in the open position.