Multi-Zone Heated Substrate Support for Trim Profile Uniformity
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Solution Overview
Problem
In substrate processing systems, particularly in atomic layer deposition, there is a challenge in controlling trim and deposition profiles to minimize critical dimension non-uniformity and imbalance across substrates, which affects yield and precision in multi-patterning processes.
Innovation Solution
A substrate processing system is developed with a temperature control system that includes temperature control elements and a controller to perform calibration processes, determining temperature calibration and sensitivity calibration values, and using these values to control temperature settings during trim and deposition steps, thereby achieving targeted critical dimensions and minimizing radial and azimuthal non-uniformities.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If temperature control elements are used during trim and deposition steps, then manufacturing precision is improved, but device complexity increases
Solution Approach 1:
The substrate support is divided into multiple independently controllable temperature zones, allowing localized temperature adjustments to different regions of the substrate. This segmentation enables precise control of trim and deposition profiles across the substrate surface, reducing critical dimension non-uniformity while managing the complexity through modular zone control rather than uniform heating.
Solution Approach 2:
Different zones of the substrate support are assigned different temperature settings based on their specific processing requirements. The system applies local quality control by tailoring temperature profiles to specific regions, enabling optimized trim and deposition characteristics in different areas of the substrate to minimize overall non-uniformity.
2Manufacturing precision
If multi-zone temperature control is implemented, then manufacturing precision is improved, but ease of operation deteriorates
Solution Approach 1:
Temperature calibration values and sensitivity calibration values are determined in advance through calibration processes. These pre-determined calibration data are stored and automatically applied during subsequent trim and deposition steps, eliminating the need for operators to manually adjust multiple temperature zones during production, thus maintaining high precision while simplifying operation.
Solution Approach 2:
The system incorporates calibration modules that automatically adjust temperature control parameters based on measured critical dimension results. This feedback mechanism allows the system to self-optimize temperature profiles for different substrates and process conditions, reducing operator burden while maintaining manufacturing precision.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system effectively controls temperature profiles across substrates to achieve precise trim and deposition steps, reducing critical dimension non-uniformity and imbalance, thereby improving yield and precision in multi-patterning processes.
Implementation Method 1
The substrate support is configured to support a first substrate and includes temperature control elements... control operation of the temperature control elements during at least one of a trim step or a deposition step
Data Source
AI summary
A substrate processing system is provided and includes a substrate support, a memory, and calibration, operating parameter, and solving modules. The substrate support supports a substrate and includes temperature control elements. The memory stores, for the temperature control elements, temperature calibration values and sensitivity calibration values. The calibration module, during calibration of the temperature control elements, performs a first calibration process to determine the temperature calibration values or a second calibration process to determine the sensitivity calibration values. The sensitivity calibration values relate at least one of trim amounts or deposition amounts to temperature changes. The operating parameter module determines operating parameters for the temperature control elements based on the temperature and sensitivity calibration values. The solving module, subsequent to the calibration of the temperature control elements, controls operation of the temperature control elements during at least one of a trim or deposition step based on the operating parameters.