Heater Base Blank Areas for Uniform Temperature Distribution
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Solution Overview
Problem
Existing heaters face challenges in achieving uniform temperature distribution across their surfaces, particularly in the circumferential direction, due to the presence of features like through-holes for lift pins, which disrupt the heating pattern and lead to temperature differences.
Innovation Solution
The design incorporates a base with specific blank areas on its surface where the heat generator is not present, arranged at regular intervals, including a first and second blank area with equal radii, and a middle portion between adjacent blank areas, ensuring uniform temperature distribution by optimizing the placement and size of these areas.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If through-holes for lift pins are provided in the base, then the heater can support and position the heating target, but the through-holes disrupt the heating pattern and cause temperature differences in the circumferential direction
Solution Approach 1:
The heating pattern is designed with different heating characteristics in different regions: the first heating pattern provides heating in radial directions while avoiding the through-holes, and the second heating pattern provides heating in circumferential directions also avoiding the through-holes. This local differentiation allows the heater to maintain temperature uniformity despite the presence of through-holes for positioning.
Solution Approach 2:
The heating pattern is divided into multiple segments (first heating pattern and second heating pattern) that are selectively activated. The first heating pattern segments the heating into radial directions, while the second heating pattern segments it into circumferential directions. This segmentation allows flexible control to compensate for temperature differences caused by through-holes.
2Use of energy by moving object
If the heat generator covers the entire third surface, then heating efficiency is maximized, but the presence of through-holes creates unavoidable temperature differences
Solution Approach 1:
The heat generator is designed with local variations in heating patterns: the first heating pattern applies heating in radial directions while the second heating pattern applies heating in circumferential directions. These localized heating zones are strategically positioned to compensate for the cooling effect of through-holes, maintaining overall temperature uniformity while preserving heating efficiency.
Solution Approach 2:
The heating parameters (intensity, distribution, direction) are changed in different regions of the third surface. By adjusting the heating pattern parameters to avoid through-holes and concentrate heating in specific areas, the system maintains both high heating efficiency and temperature uniformity despite the interruptions caused by through-holes.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration allows for reduced temperature differences in both the circumferential and radial directions, making it suitable for heating applications requiring high uniformity, such as semiconductor wafers.
Implementation Method 1
a heat generator disposed on a third surface of the base
Data Source
AI summary
A heater includes a base having a first surface and a second surface, and a heat generator disposed on a third surface of the base, the third surface being parallel to the first surface. The base includes a hole portion that opens in at least the second surface. The third surface includes a plurality of blank areas on each of which the heat generator is not present and each of which is circular. The blank areas include a first blank area including a region that the hole portion overlaps and a second blank area that does not include a region that the hole portion overlaps.