Substrate Support Heater Calibration for Accurate Temperature Control
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
In semiconductor manufacturing, controlling the temperature of a substrate with high accuracy is challenging due to the increase in the number of regions where temperatures can be independently controlled, leading to difficulties in providing heaters and temperature sensors, and variations in source voltage affecting resistance measurements and temperature estimation.
Innovation Solution
A correction data creating method that involves selecting a source voltage, adjusting power to heaters based on temperature conversion data, measuring the temperature, calculating correction values, and creating correction data to accurately control the temperature of the substrate, even with variations in source voltage and frequency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the number of regions of the substrate support where temperatures can be independently controlled increases, then temperature control accuracy is improved, but the size of each region decreases making it difficult to provide heaters and temperature sensors to all regions
Solution Approach 1:
The patent extracts the temperature sensing function from physical temperature sensors and replaces it with resistance measurement of heaters. By measuring the resistance of heaters (which can be easily provided in all regions) instead of using separate temperature sensors, the system achieves temperature information acquisition without the complexity of providing sensors to each region.
Solution Approach 2:
The patent makes the heaters serve dual functions: both heating the substrate support and sensing temperature through resistance measurement. This multi-functionality eliminates the need for separate temperature sensors in each region, resolving the contradiction between temperature control accuracy and device complexity.
2Device complexity
If temperature estimation is performed based on heater resistance, then temperature control is achieved without additional sensors, but source voltage variations affect resistance measurements and reduce estimation accuracy
Solution Approach 1:
The patent implements feedback by measuring the actual source voltage and using it to correct the resistance measurement. The correction value calculation unit uses the measured source voltage to adjust the resistance value, compensating for voltage variations and improving temperature estimation accuracy.
Solution Approach 2:
The patent changes the parameter used for temperature estimation from raw resistance value to corrected resistance value that accounts for source voltage variations. By adjusting the resistance measurement based on actual voltage conditions, the system maintains high measurement precision while avoiding additional sensors.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method enables precise temperature control of the substrate with high accuracy, reducing errors caused by source voltage variations and allowing for effective temperature management across multiple regions.
Implementation Method 1
a source voltage is supplied to a heater for heating a substrate support
Implementation Method 2
measuring a relationship between temperatures and resistances of the heaters respectively disposed in the regions of the substrate support where temperatures can be controlled independently and estimating the temperatures of the respective regions from the resistances of the heaters
Data Source
AI summary
A correction data creating method is provided. In the method, a source voltage is sequentially selected among a plurality of source voltages determined in advance and the selected source voltage is supplied to a heater for heating a substrate support. At the source voltage supplied to the heater, a power supplied to the heater is adjusted such that a resistance of the heater becomes a resistance value corresponding to a predetermined first temperature based on temperature conversion data indicating a relationship between the resistance of the heater and a temperature of the heater. A temperature of the substrate support is measured at a position where the heater is disposed as a second temperature. A correction value corresponding to the difference between the predetermined first temperature and the second temperature is calculated, and correction data indicating a corresponding relationship between each of the source voltages and the correction value is created.