Heater Circuit Abnormality Detection in Substrate Processing
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Solution Overview
Problem
In semiconductor manufacturing, existing technologies fail to reliably detect failures in components of the drive circuit of substrate processing apparatuses, particularly in heater systems, leading to potential overheating and non-uniform temperature distributions, which can result in substrate defects and apparatus failures.
Innovation Solution
A processing apparatus equipped with a temperature detector, a temperature regulator, a current measurer, and an abnormality detector that compares measured current values with theoretical values calculated based on power output ratios to detect abnormalities, ensuring timely intervention and preventing overheating.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If existing detection techniques are used for heater components, then the apparatus structure remains simple, but the reliability of failure detection is insufficient
Solution Approach 1:
The system continuously monitors the current flowing through the heater and compares it with the theoretically expected current value calculated from the power supply ratio. This closed-loop feedback mechanism enables reliable detection of component failures by identifying deviations between actual and expected current values, resolving the contradiction between detection reliability and system complexity.
Solution Approach 2:
The invention replaces complex mechanical or electronic failure detection mechanisms with an electrical measurement approach. By using a current measurer to monitor electrical current and comparing it with calculated theoretical values, the system achieves reliable failure detection through electrical parameters rather than mechanical inspection or complex diagnostic systems.
2Reliability
If component failures are not detected, then the apparatus operates continuously with high productivity, but overheating and substrate defects occur
Solution Approach 1:
The system performs preliminary detection of component failures by continuously monitoring current values before they lead to overheating or substrate defects. By detecting abnormalities in the drive circuit components early through current measurement and comparison, the system can take preventive action to maintain temperature control reliability while minimizing disruptions to batch process productivity.
3Measurement precision
If simple current monitoring is used, then the device complexity is low, but the precision of abnormality detection is insufficient
Solution Approach 1:
The system introduces an intermediary calculated theoretical current value as a reference standard. By comparing the actually measured current with this theoretically expected value (derived from power supply ratio and heater resistance), the system achieves precise abnormality detection without requiring complex measurement equipment. The theoretical value serves as a mediator that enables accurate fault detection through simple current measurement.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution effectively detects component failures in the drive circuit, preventing overheating and ensuring uniform temperature distributions, thereby reducing the risk of substrate defects and apparatus failures, and allowing for proactive maintenance to avoid batch process disruptions.
Implementation Method 1
a heat generator capable of elevating a temperature of a process chamber by generating a heat
Data Source
AI summary
According to one aspect of the technique of the present disclosure, there is provided a substrate processing apparatus including: a temperature detector for detecting a temperature of a heat generator for elevating a temperature of a process chamber by generating heat; a temperature regulator for adjusting a ratio of outputting an electric power capable of being supplied to the heat generator in a unit time to reduce a difference between a temperature obtained from the temperature detector and a temperature setting value; a measurer or measuring a current flowing through a circuit containing the heat generator; and an abnormality detector for comparing a current measurement value measured by the measurer and a theoretical current value calculated based on the ratio of outputting the electric power acquired from the temperature regulator and determine that there is an abnormality when the current measurement value and the theoretical current value are different.