Heater Wire Offset Layout for Multi-Zone Stage Temperature Control
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Solution Overview
Problem
The complexity and interference issues in semiconductor production apparatuses increase with the number of temperature-controllable zones, leading to a higher number of heater power feeders and wires, which complicates assembly and maintenance.
Innovation Solution
A heater power feeding mechanism with offset structures for heater wires and terminals, positioned on the periphery of a holding plate, reduces interference with other components and allows for efficient multi-zone temperature control.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If multiple heater power feeders are provided for multi-zone temperature control, then temperature uniformity is improved, but device complexity increases
Solution Approach 1:
Multiple heater power feeders are integrated into a single housing, merging multiple independent power feeding functions into one unified structure. This reduces the number of separate components and simplifies the overall device complexity while maintaining multi-zone temperature control capability
Solution Approach 2:
The housing structure serves multiple functions simultaneously: it houses multiple heater power feeders, provides structural support, and enables multi-zone temperature control. This multi-functionality reduces the need for additional separate components, thereby reducing device complexity
2Adaptability or versatility
If the number of heater wires is increased for multi-zone control, then temperature control capability is improved, but interference with other components increases
Solution Approach 1:
Multiple heater wires are nested within the housing structure, with each wire routed through designated pathways inside the housing. This nesting arrangement consolidates the wires into a compact configuration, preventing them from interfering with other components outside the housing
Solution Approach 2:
The housing acts as an intermediary structure that contains and organizes the heater wires. By providing a dedicated enclosed space for wire routing, the housing mediates between the need for multiple wires and the need to avoid interference with other components
3Adaptability or versatility
If more heater power feeders are added, then multi-zone control is improved, but assembly and maintenance workload increases
Solution Approach 1:
Multiple heater power feeders are combined into a single integrated housing unit, allowing them to be assembled and maintained as one component rather than multiple separate parts. This merging significantly reduces the assembly and maintenance workload while preserving multi-zone temperature control functionality
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration minimizes interference with other components, simplifies assembly and maintenance, and maintains in-plane temperature uniformity even with a large number of heaters, improving work efficiency.
Implementation Method 1
one heater power feeder is provided for each heater... multiple heaters are embedded in a stage... control the temperature of the zones of the stage
Data Source
AI summary
A heater power feeding mechanism for independently controlling temperatures of zones of a stage on which a substrate is placed. The respective zones of the stage include heaters. The heater power feeding mechanism includes a plurality of heater terminals configured to be connected to the heaters, a plurality of heater wires connected to the heater terminals, and an offset structure that offsets the heater wires from each other. The heater terminals are disposed on the periphery of a holding plate for holding the stage.