Heater Wire Life Estimation via Power Amplitude Detection

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Solution Overview

Problem

Existing methods for estimating the life of heater wires in vertical type heating apparatuses are inadequate, as they fail to accurately detect degradation before disconnection, leading to unexpected wire failure and inefficient maintenance schedules.

Innovation Solution

A method that involves detecting the maximum value and amplitude of electric power supplied to the heater wire during the temperature rising period, allowing for earlier and more accurate estimation of wire life by identifying signs of disconnection before they occur.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If electrical data is collected during the stabilized temperature period to estimate heater wire life, then the measurement can be performed after temperature stabilization, but the degradation signs are not apparent enough and life estimation is too late

Engineering Contradiction:
Improvelife estimation accuracyVSAvoidtime for life estimation
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The patent applies preliminary action by collecting electrical data during the temperature rising period before the stabilized temperature period. This allows degradation signs to be detected earlier when they are more apparent, enabling timely life estimation before the heater wire fails during the heating process.

Inventive Principle:
Principle #10Preliminary action

2Reliability

If resistance value monitoring is used to estimate disconnection time, then life estimation can be performed, but the method cannot detect degradation early enough before disconnection

Engineering Contradiction:
Improveheater wire reliabilityVSAvoiddegradation detection accuracy
Core Design Contradiction:
ReliabilityVSMeasurement precision

Solution Approach 1:

The patent changes the parameter being monitored from resistance value to electrical power during the temperature rising period. This parameter change enables earlier detection of degradation because the electrical power characteristics become more apparent during the temperature rising phase compared to the stabilized phase.

Inventive Principle:
Principle #35Parameter changes

3Stability of the object's composition

If electric power is measured during stabilized temperature period, then the temperature is stable for measurement, but the heater wire may disconnect before measurement can be performed

Engineering Contradiction:
Improvetemperature stabilityVSAvoidheater wire operational reliability
Core Design Contradiction:
Stability of the object's compositionVSReliability

Solution Approach 1:

The patent performs electrical power measurement during the temperature rising period as a preliminary action before the stabilized temperature period. This timing allows detection of degradation trends early, providing enough lead time to replace the heater wire before it disconnects during the heating process.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables more precise and timely estimation of heater wire life, reducing the risk of unexpected failures and improving maintenance scheduling by utilizing data from the temperature rising period where degradation signs are more apparent.

Implementation Method 1

a heater wire provided outside the processing chamber and adapted for generating heat up to a temperature based on magnitude of electric power supplied from a power source

Methodology Applied
Scientific EffectJoule heating: Joule Heating

Data Source

PatentUS8121799B2Life estimating method for heater wire, heating apparatus, storage medium, and life estimating system for heater wire
Publication Date: 2012.02.21 TOKYO ELECTRON LTD
  • US8121799B2 patent drawing
  • US8121799B2 patent drawing
  • US8121799B2 patent drawing

AI summary

A method of estimating the life of a heater wire, including the steps of: detecting a maximum value of electric power supplied to the heater wire during a temperature rising period during which a temperature is elevated to a preset heating temperature, obtaining an index indicative of the amplitude of the electric power, and giving a notice that the heater wire is approaching the end of its life when the electric power and the index indicative of the of amplitude of the electric power exceed threshold values respectively provided thereto.