Heating Apparatus Partition for Thermal Isolation
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Solution Overview
Problem
Conventional heating apparatuses in semiconductor device manufacturing have a low thermal response and accuracy in temperature measurement, which hinders the efficient processing of substrates, particularly in processes requiring rapid temperature changes and high precision.
Innovation Solution
A heating apparatus with a cooling medium passage between inner and outer shells, featuring a partition to separate the temperature detector from the cooling medium and a gap insulated with electrically insulating materials, enhances thermal response and measurement accuracy by minimizing heat interference and allowing for rapid cooling and heating.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If a large amount of thermally insulating materials is used in the conventional heating apparatus, then the heaters can be used in middle and high temperature ranges, but the temperature increase and decrease response is low and throughput is hardly improved
Solution Approach 1:
The heating apparatus is divided into multiple heating zones with independent heaters, allowing different temperature ranges to be optimized separately. The first heater handles high temperature ranges while the second heater handles lower temperature ranges, enabling rapid temperature changes without requiring excessive insulating material throughout the entire apparatus.
Solution Approach 2:
Thermally insulating materials are selectively applied only where high temperature resistance is needed, rather than uniformly throughout the apparatus. This localized insulation approach maintains temperature range capability while reducing overall thermal mass and improving temperature response speed.
2Device complexity
If conventional heating apparatus design is used, then structural simplicity is maintained, but the accuracy of temperature measurement is poor due to reflected or radiated heat affecting the temperature detector
Solution Approach 1:
The temperature detector is extracted from the direct heating zone and positioned in a location where it is not exposed to reflected or radiated heat from the heaters. This separation allows accurate temperature measurement without requiring complex shielding structures, maintaining overall structural simplicity while improving measurement precision.
Solution Approach 2:
A protective structure or positioning arrangement acts as an intermediary between the heater and temperature detector, preventing direct thermal radiation from affecting the detector while maintaining a simple overall structure. This intermediary element enables accurate measurement without adding significant structural complexity.
3Measurement precision
If the temperature detector is placed close to the heating element for accurate measurement, then measurement precision improves, but the detector is affected by reflected or radiated heat reducing accuracy
Solution Approach 1:
The temperature detector is extracted from the direct path of reflected and radiated heat while remaining positioned to accurately measure the temperature of the heating element. This extraction eliminates the harmful thermal radiation effect while preserving measurement accuracy through strategic positioning.
Solution Approach 2:
The detector positioning optimizes local measurement quality by placing the detector in a specific location where it can accurately sense heating element temperature without being exposed to harmful radiated heat, achieving both accuracy and protection through localized positioning optimization.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design improves the thermal response and accuracy of temperature measurement, enabling faster processing and higher throughput in semiconductor device manufacturing by effectively managing heat distribution and maintaining precise temperature control.
Implementation Method 1
a cooling medium passage for conveying a cooling medium between the inner shell and the outer shell
Implementation Method 2
a insulator for shutting up a gap provided between the partition and the second opening
Implementation Method 3
heating wires 503 mounted to the inner wall of the thermal insulator material 502
Data Source
AI summary
A heating apparatus comprises a heating element, an inner shell for supporting the heating element, an outer shell disposed along the outer boundary of the inner shell, a cooling medium passage for conveying a cooling medium between the inner shell and the outer shell, a first opening provided in the inner shell, a second opening provided in the outer shell, and a partition arranged to extend from the first opening to the second opening for developing at least a space separated from the cooling medium passage and between the inner shell and the outer shell. The heating apparatus further comprises an insulator for shutting up a gap provided between the partition and the second opening.