Heating Crucible Inner Member for Uniform Organic Deposition
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing vacuum deposition apparatuses face issues with improper deposition of organic compounds in lumps on substrates and masks, leading to uneven film deposition, nozzle blockages, and energy inefficiencies due to sudden vaporization and uneven heating of organic compounds.
Innovation Solution
A heating crucible with a main body and inner member featuring openings around the nozzle edge to guide vaporized organic compounds, preventing lump deposition and ensuring even heating, comprising a cap with a central nozzle and a heater, and an inner plate with strategically positioned openings to manage pressure and collision of molecules.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a net-type curtain is installed on the opening of the heating crucible to prevent lump deposition, then deposition uniformity is improved, but heat conduction is hindered and foreign material vaporization is impaired
Solution Approach 1:
The harmful net-type curtain is completely removed from the heating crucible opening. Instead, an inner crucible is extracted and positioned within the main crucible to perform the function of controlling vaporization and preventing lump deposition, while maintaining unobstructed heat conduction to the organic compound.
Solution Approach 2:
An inner crucible is introduced as an intermediary component between the heater and the organic compound. This inner crucible controls the vaporization process and prevents lump formation without blocking heat conduction, as it is positioned to allow thermal energy transfer while managing the vaporization interface.
2Device complexity
If the organic compound is heated by a heater installed on the outer circumferential surface of the heating crucible, then the heating structure is simplified, but the organic compound is not evenly heated and cannot vaporize uniformly
Solution Approach 1:
The heating system is segmented into an outer heater and an inner crucible structure. The heater remains on the outer circumferential surface for structural simplicity, while the inner crucible segments the organic compound containment space, allowing controlled and uniform vaporization across the interior surface exposed to the heater.
Solution Approach 2:
The inner crucible creates localized heating zones within the main crucible. The organic compound is contained in a specific interior space of the inner crucible that is optimally positioned to receive uniform heat from the outer heater, ensuring even vaporization across the vaporization surface.
3Device complexity
If the heating crucible operates without an inner member with openings, then the structure is simpler, but sudden vaporization occurs causing lump deposition on substrates and masks
Solution Approach 1:
An inner crucible is nested within the main heating crucible. The inner crucible contains the organic compound in a controlled interior space and has openings that regulate vapor release. This nested structure prevents sudden vaporization and lump deposition while adding minimal structural complexity.
Solution Approach 2:
The inner crucible with openings performs preliminary control of the vaporization process. By regulating the release of vaporized organic compound through its openings, it prevents sudden vaporization events before the material reaches the substrate, ensuring uniform deposition.
4Productivity
If the organic compound vaporizes in lumps, then the deposition process is faster, but deposition lumps attach to the mask opening and substrate, causing uneven film and dark images
Solution Approach 1:
The inner crucible with openings converts the potential harm of rapid vaporization into a benefit by controlling the vapor release. The openings allow vapor to escape at a regulated rate, transforming what would be lump-forming sudden vaporization into a controlled, uniform vapor stream that deposits evenly on the substrate.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Prevents lump deposition on substrates and masks, maintains nozzle integrity, and enhances energy efficiency by ensuring uniform vaporization and deposition of organic compounds as molecules, reducing the occurrence of dark images and improving film evenness.
Implementation Method 1
a heater that is installed at the heating crucible and heats and vaporizes the organic compound
Implementation Method 2
thin organic films, such as, the hole transport layer, the emitting layer, the electron transport layer, or the like, are formed using a deposition apparatus
Data Source
AI summary
A deposition apparatus includes a vacuum chamber and a heating crucible. A substrate, on which deposition films are formed, is installed in the vacuum chamber. The heating crucible is installed opposite to the substrate so as to vaporize an organic compound. The heating crucible includes a main body and an inner plate. The main body includes a space which contains the organic compound and a nozzle through which the organic compound that is vaporized is discharged. The inner plate is installed within the main body and includes at least one opening formed around an edge of an area facing the nozzle, so as to transmit the vaporized organic compound.