Heating Device Electrode Terminal Segmentation
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Solution Overview
Problem
Conventional heating devices for semiconductor manufacturing face challenges in achieving uniform temperature across the holding surface and minimizing damage to the joint portion between electrode terminals and power receiving electrodes due to heat escape and stress generated by electrode terminal swinging.
Innovation Solution
The heating device incorporates a columnar member assembly with a large-diameter portion and a general portion for the electrode terminal units, where the large-diameter portion reduces excessive swinging and heat escape, thereby minimizing stress and damage to the joint portion.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If the diameter of the electrode terminal is reduced to minimize heat escape, then surface thermal uniformity is improved, but the joint portion size is reduced making it more susceptible to stress damage
Solution Approach 1:
The electrode terminal is divided into multiple segments (first electrode terminal and second electrode terminal) connected in series. Each segment has its own joint portion with the power receiving electrode, distributing the stress and electrical load. This segmentation allows each joint portion to be smaller (reducing heat escape) while the series connection maintains overall reliability through redundancy and stress distribution.
Solution Approach 2:
The patent applies different properties to different parts of the electrode terminal structure. The joint portions are designed with specific dimensions and materials optimized for electrical connection and stress resistance, while the terminal extensions can be optimized for minimal heat conduction. This local optimization allows small joint portions for thermal uniformity while maintaining structural integrity through carefully designed local features.
2Reliability
If the electrode terminal length is increased to reduce stress concentration, then joint portion durability is improved, but the electrode terminal swings more causing stress generation
Solution Approach 1:
By dividing the electrode terminal into multiple segments, each segment can be kept relatively short and stable, reducing swinging. The series connection of multiple short segments achieves the electrical function of a longer terminal without the instability of a single long terminal. Each segment's joint portion is optimized for durability while the overall structure maintains stability.
Solution Approach 2:
The electrode terminal structure is designed to be flexible enough to accommodate thermal expansion and mechanical stress through controlled movement at the joint portions, while maintaining overall stability. The segmented structure allows each segment to dynamically adjust to stress without causing excessive swinging that would damage the joints.
3Temperature
If the diameter of the electrode terminal is minimized to reduce heat escape, then surface thermal uniformity is improved, but the amount of stress generated in the joint portion increases
Solution Approach 1:
The electrode terminal is segmented into multiple sections, each with its own joint portion. This segmentation distributes the electrical current and thermal load across multiple smaller joint portions, reducing the stress concentration at each individual joint. The cumulative effect of multiple small joints matches or exceeds the performance of a single large joint while maintaining better thermal uniformity.
Solution Approach 2:
The patent optimizes the dimensional parameters of the electrode terminal and joint portions to balance heat escape and stress. By carefully selecting the diameter, length, and material properties of each segment and joint portion, the design achieves minimal heat conduction while keeping stress within acceptable limits through parameter optimization rather than simply increasing size.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enhances surface thermal uniformity by reducing heat loss and stress on the joint portions, preventing damage and improving the reliability of the heating device.
Implementation Method 1
a resistive heating element disposed inside the holding member... When a voltage is applied to the resistive heating element via the electrode terminal and the power receiving electrode, the resistive heating element generates heat
Implementation Method 2
one end portion of the first columnar member on the holding member side is joined to the power receiving electrode via a brazing filler metal
Data Source
AI summary
A heating device includes a holding member having a resistive heating element, a columnar support member joined to the holding member, power receiving electrodes connected to the resistive heating element, and an electrode terminal unit disposed in each of through holes in the columnar support member. Each of the electrode terminal units includes a first columnar member having one end portion connected to the power receiving electrode and the other end portion connected to a metal stranded wire, and a second columnar member having an end portion connected to the metal stranded wire. A columnar member assembly having a portion of the first columnar member and a portion of the second columnar member includes a general portion and a large-diameter portion. The distance between the large-diameter portion and an inner peripheral surface of the through hole is smaller than the distance between the general portion and the inner peripheral surface.